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首页> 外文会议>European Conference Exhibition on Integration Issues of Miniaturized Systems – MEMS, MOEMS, ICs and Electronic Components >Tunable/Switchable Thin Film Bulk Acoustic Wave (BAW) resonator using thin electrostrictive film under DC bias for GHz applications
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Tunable/Switchable Thin Film Bulk Acoustic Wave (BAW) resonator using thin electrostrictive film under DC bias for GHz applications

机译：可调谐/可切换薄膜散装声波（BAW）谐振器在GHz应用的直流偏压下使用薄电致伸缩膜

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摘要

In the last decade, the emerging world market of Bulk Acoustic Wave (BAW) resonators for RF filtering functions in front-end modules has become a strong business issue for many companies. Among the leader companies, Avago first started commercialization of filters based on air gap Film Bulk Acoustic Resonator (FBAR) in 1999 whereas Infineon reached the market with Solidly Mounted Resonators (SMR) in 2002. Up to now, these filters were designed to satisfy one RF band requirements only (either GSM, PCS or DCS, ...). Recently, a new challenge must be addressed for BAW filters. The trend of providing reconfigurable front-ends able to operate in multiple standard Radio-Frequency (RF) bands of telecommunication systems involves an upcoming development of more complex tunable/switchable BAW filters. In this condition, electrostrictive materials in BAW devices are very promising candidates to fulfill this function in replacement of the classical piezoelectric materials. In this work, we investigate electrostrictive Strontium Titanate (STO) as a new material in a SMR. This material exhibits piezoelectric-like behavior induced by electrostriction when excited by an RF signal superimposed over a Direct Current (DC) bias. This work first reports design, process, simulation and characterization of such an acoustic resonator.
机译：在过去十年中，前端模块中的RF过滤功能的批量声波（BAW）谐振器的新兴世界市场已成为许多公司的强大商业问题。在领导者公司中，Avago于1999年首次开始基于空气隙薄膜散装声谐振器（FBAR）的过滤器商业化，而英飞凌于2002年使用稳固的谐振器（SMR）达到了市场。目前，这些过滤器旨在满足一个RF频段要求（GSM，PC或DCS，...）。最近，必须针对BAW过滤器解决新的挑战。提供能够在电信系统的多标准射频（RF）频带中操作的可重构前端的趋势涉及即将开发的更复杂的可调/可切换的BAW滤波器。在这种情况下，BAW器件中的电致伸缩材料是非常有希望的候选者，以满足置换经典压电材料的这种功能。在这项工作中，我们将电致伸缩锶（STO）作为SMR中的新材料进行研究。当通过叠加在直流电流（DC）偏置的RF信号激发时，该材料表现出由电触发的压电状行为。这项工作首先报道了这种声学谐振器的设计，过程，仿真和表征。

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