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首页> 外文会议>Conference on Active and passive smart structures and integrated systems >Vibration. Control of Piezoelectrically Actuated Microcantilevers
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Vibration. Control of Piezoelectrically Actuated Microcantilevers

机译：振动。控制压电驱动的微电子

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摘要

The vibration control of microelectromechanical structures is an interesting and challengingresearch area that is extensively applicable in micro-mass measurement, micro-sensors andmicro-mirror control. An active vibration control technique based on positive position feedbackmethod is constructed in this paper. This method is used to control the vibration ofmicrocantilevers through actuation of a piezoelectric layer that covers one side of themicrocantilever. The modified version of positive position feedback used in this paper, employsa second order compensator for vibration suppression, and a first order compensator providesdamping. Since the positive position feedback control is based on strain sensing approach, it isextensively applied to piezoelectrically controlled microcantilevers. Similar to conventionalpositive position feedback, stability conditions are global and independent of the dynamicalcharacteristics of the open-loop system. Root locus diagrams are used to find proper compensatorfrequency and damping of the closed loop system. A numerical simulation is performed toevaluate the performance of the modified positive position feedback for both steady-state andtransient dynamic control. The results indicate that the proposed method is more effective incontrolling both steady-state and transient dynamics than conventional positive positionfeedback.
机译：微机电结构的振动控制是一种有趣和挑战的研究领域，广泛适用于微观测量，微传感器和镜像控制。本文构建了基于正位置反馈方法的主动振动控制技术。该方法用于通过致动覆盖主机膜的一侧的压电层来控制Microcantilevers的振动。本文使用的正位置反馈的改进版本，施用用于振动抑制的二阶补偿器，以及一阶补偿器提供拆下。由于正位置反馈控制基于应变感测方法，因此它被广泛地应用于压电控制的微电势。与传统的位置反馈类似，稳定性条件是全球性的，并且独立于开环系统的动态特征。根轨迹图用于找到闭环系统的适当补偿器频率和阻尼。执行数值模拟，以evaluate用于稳态和段动态控制的改进的正位置反馈的性能。结果表明，所提出的方法比传统的正位置反射更有效地应对稳态和瞬态动力学。

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