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首页> 外文会议>American Society For Engineering Education Annual Conference and Exposition >DESIGN AND COMPUTATIONAL ANALYSIS OF DIAPHRAGM BASED PIEZORESISTIVE PRESSURE SENSORS FOR INTEGRATION INTO UNDERGRADUATE CURRICULUM
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DESIGN AND COMPUTATIONAL ANALYSIS OF DIAPHRAGM BASED PIEZORESISTIVE PRESSURE SENSORS FOR INTEGRATION INTO UNDERGRADUATE CURRICULUM

机译：基于隔膜的压阻式压力传感器的设计与计算分析，用于整合本科课程

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摘要

In order to expand undergraduate education in microelectromechanical systems (MEMS), and nanotechnology, a series of sensors were designed with the intent of integrating the design process into the project portion of a micro/nano systems course. The majority of the design work was focused around piezoresistive, diaphragm-based pressure sensors, utilizing multiple diaphragm sizes and geometries. These sensors were chosen for their geometrical simplicity and their ability to be manufactured using available photolithographic techniques. In order to gain a deeper understanding of the stress distribution in these sensors, leading to better design decisions, the Finite Element Analysis (FEA) technique was used. Results from this analysis were validated using analytical models available in the literature. Once this validation was accomplished, multiple iterations of FEA were performed in order to gain further understanding of the stress variation relative to diaphragm specifications. The results of these simulations were used to optimize the placement of the piezoresistors on the diaphragm and to assess the effect of process variation on the performance of the device. This analysis procedure aided in the design of pressure sensors with different sets of diaphragm geometries. The design and analysis procedures were documented and followed by students enrolled in the Nanosystems Engineering course to design and analyze the sensor type of their choice.
机译：为了扩大微机电系统（MEMS）和纳米技术的本科教育，设计了一系列传感器，目的是将设计过程集成到微/纳米系统课程的项目部分中。大多数设计工作都集中在压渗透压，基于隔膜的压力传感器，利用多个隔膜尺寸和几何形状。选择这些传感器的几何简单性及其使用可用光刻技术制造的能力。为了更深入地了解这些传感器中的应力分布，导致更好的设计决策，使用了有限元分析（FEA）技术。使用文献中可用的分析模型验证了该分析的结果。完成该验证后，进行了多次FEA的迭代，以进一步了解相对于隔膜规范的应力变化。这些模拟的结果用于优化压阻器对隔膜上的放置，并评估过程变化对装置性能的影响。该分析程序在具有不同膜片几何形状的压力传感器的设计中辅助。设计和分析程序被记录，然后参加了纳米系统工程课程的学生设计和分析了他们选择的传感器类型。

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