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首页> 外文会议>Vacuum engineering conference >Preparation of Two-Layer Hi-Strength Antireflective Coatings Used in Solar Glass by Magnetron Sputtering
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Preparation of Two-Layer Hi-Strength Antireflective Coatings Used in Solar Glass by Magnetron Sputtering

机译：磁控溅射在太阳能玻璃中使用的两层高强度抗反射涂层的制备

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摘要

A type of two-layer SiO2-TiO2 antireflective (AR) coatings used in solar glass was introduced in this paper to improve the complicated two-step catalytic process and promote the mechanical strength of the coatings. Based on the coating design program,the reflectance of the two-layer (?/4-?/2 type) AR coatings and the optical parameters of the coating were designed and optimized. Meanwhile,the two-layer SiO2-TiO2 AR coatings was successfully coated on the glass substrate by Medium Frequency Reactive Magnetron sputtering (MFRMS) method. The performance of the coatings was analyzed with instruments such as Ellipsometer,UV-VIS-NIR Spectrophotometer,Atomic Force Microscopy. The results show that the average transmittance of glass coated in this way was increased by more than 6.8% at the wave band of 400 nm~800 nm. And the mechanical strength of the coatings is very well.
机译：在本文中引入了一种用于太阳玻璃的两层SiO2-TiO2抗反射（AR）涂层，以改善复杂的两步催化过程并促进涂层的机械强度。基于涂层设计程序，设计并优化了两层（α/ 4 - β/ 2型）Ar涂层和涂层光学参数的反射率。同时，通过中频反应磁控溅射（MFRMS）方法在玻璃基板上成功涂覆两层SiO2-TiO2 Ar涂层。用椭圆仪，UV-Vis-Nir分光光度计，原子力显微镜检查等仪器分析涂层的性能。结果表明，在这种方式涂覆的玻璃的平均透射率在400nm〜800nm的波浪带中增加了大于6.8％。并且涂层的机械强度非常好。

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