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Preparation of Two-Layer Hi-Strength Antireflective Coatings Used in Solar Glass by Magnetron Sputtering

机译:磁控溅射制备太阳能玻璃两层高强度减反射膜

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摘要

A type of two-layer SiO2-TiO2 antireflective (AR) coatings used in solar glass was introduced in this paper to improve the complicated two-step catalytic process and promote the mechanical strength of the coatings. Based on the coating design program,the reflectance of the two-layer (?/4-?/2 type) AR coatings and the optical parameters of the coating were designed and optimized. Meanwhile,the two-layer SiO2-TiO2 AR coatings was successfully coated on the glass substrate by Medium Frequency Reactive Magnetron sputtering (MFRMS) method. The performance of the coatings was analyzed with instruments such as Ellipsometer,UV-VIS-NIR Spectrophotometer,Atomic Force Microscopy. The results show that the average transmittance of glass coated in this way was increased by more than 6.8% at the wave band of 400 nm~800 nm. And the mechanical strength of the coatings is very well.
机译:本文介绍了一种用于太阳能玻璃的两层SiO2-TiO2增透膜,以改善复杂的两步催化工艺并提高其机械强度。根据涂层设计程序,设计并优化了两层(λ/4-λ/ 2型)增透膜的反射率和光学参数。同时,通过中频反应磁控溅射(MFRMS)方法成功地在玻璃基板上涂覆了两层SiO2-TiO2增透膜。用椭圆仪,紫外可见近红外分光光度计,原子力显微镜等仪器分析了涂层的性能。结果表明,在400 nm〜800 nm波段,以这种方式涂覆的玻璃的平均透射率提高了6.8%以上。而且涂层的机械强度非常好。

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