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首页> 外文会议>IUMRS International Conference in Asia >Synthesis and Fabrication of Novel Polymeric/Organic Materials for Micro/Nano-scale Optical Printed Circuit Board and VLSI Photonic Integrated Circuit Application
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Synthesis and Fabrication of Novel Polymeric/Organic Materials for Micro/Nano-scale Optical Printed Circuit Board and VLSI Photonic Integrated Circuit Application

机译：微/纳米光印刷电路板和VLSI光子集成电路应用的新型聚合物/有机材料的合成与制造

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摘要

We report on the synthesis and fabrication of novel polymer/organic materials for application for what we call optical printed circuit board (O-PCB) for VLSI photonic circuit (VLSI-PIC). We synthesize copolymers containing cross-linkable pendant groups suitable for embossing and novel device fabrication. We also synthesize organic-inorganic hybrid materials of low optical absorption, good adhesion, low dielectric constant, high dielectric strength, high thermal stability, excellent photo-patterning possibility and variability of refractive index. Steps of synthesis and fabrication of these materials are described along with their optical, material, and performance characteristics. O-PCB and VLSI photonic circuit design and fabrication processes are also presented.
机译：我们报道了新型聚合物/有机材料的合成和制造，用于应用VLSI光子电路（VLSI-PIC）的光印刷电路板（O-PCB）的应用。我们合成含有适用于压花和新型器件制造的可交联侧基的共聚物。我们还合成了低光学吸收，良好粘附，低介电常数，高介电强度，高热稳定性，优异的光图案化的可能性和折射率的可变性的有机 - 无机混合材料。与它们的光学，材料和性能特征一起描述这些材料的合成步骤和制造这些材料。还提出了O-PCB和VLSI光子电路设计和制造工艺。

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