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首页> 外文会议>International Conference on Materials and Products Manufacturing Technology >Numerical Analysis and Experimental Results by Silicon-Based MHz Ultrasonic Nozzles to Product of Monodisperse Droplets
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Numerical Analysis and Experimental Results by Silicon-Based MHz Ultrasonic Nozzles to Product of Monodisperse Droplets

机译：基于硅的MHz超声喷嘴对单分散液滴产品的数值分析与实验结果

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摘要

Monodisperse de-ionized water droplets 4.5 μm in diameter have been produced in ultrasonic atomization using micro electro-mechanical system (MEMS)-based three-Fourier horn 1 MHz silicon nozzles. The required electrical drive power and voltage are 15 mW and 6.5 V, respectively. The nozzles measure 1.80 × 0.21 × 0.11 cm~3 and can accommodate flow rate of 2 to 300 μl/min. As liquid enters the 200 μm × 200 μm central channel of the nozzle, a curved thin liquid film is maintained at the nozzle tip that vibrates longitudinally at the nozzle resonance frequency, resulting in formation of standing capillary waves on the free surface of the liquid film. As the tip vibration amplitude exceeds a threshold (critical or onset amplitude), the standing capillary waves become unstable (temporal instability) and a spray of monodisperse droplets (mist) is produced. The experimental results of resonance frequency, droplet diameter, voltage requirement and critical or onset amplitude support the predictions of the three-dimensional finite element simulation and the linear theory of capillary wave atomization mechanism.
机译：通过微机电系统（MEMS）基于三傅里叶喇叭1MHz硅喷嘴，在超声雾化中产生了直径4.5μm的直径4.5μm。所需的电驱动功率和电压分别为15 MW和6.5V。喷嘴测量1.80×0.21×0.11cm〜3，可容纳2至300μl/ min的流速。随着液体进入喷嘴的200μm×200μm中心通道，将弯曲的薄液膜保持在喷嘴尖端，在喷嘴尖端处纵向振动，导致液体膜的自由表面上形成常规毛细波。由于尖端振动幅度超过阈值（临界或开始幅度），因此常设毛细波变得不稳定（时间不稳定），并且产生单分散液滴（雾）的喷射。谐振频率，液滴直径，电压要求和临界或开始幅度的实验结果支持三维有限元模拟和毛细波雾化机构的线性理论的预测。

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