ELECTROCOAGULATION OF CHEMICAL MECHANICAL POLISHING (CMP) WASTEWATER- A STEP TOWARDS ZERO WASTE

机译：化学机械抛光（CMP）废水的电凝 - 朝向零废物的步骤

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Current study employed the electrocoagulation as an alternative treatment method on chemical mechanical polishing (CMP) wastewater to compare the effectiveness of sludge reduction with conventional treatment method. Bench-scale model of chemical coagulation and electrocoagulation using aluminum (anode) and iron (cathode) as electrodes were carried out and the total sludge recorded are 3105 mg/L and 1325 mg/L, respectively. Reduction of approximately 57.3% total sludge is obtained using electrocoagulation. The predicted treatment cost on sludge disposal using the electrocoagulation method is RM 80,000-RM100, 000 (42.7% of the chemical coagulation).

机译：目前的研究采用电凝作为化学机械抛光（CMP）废水上的替代处理方法，以比较污泥降低与常规处理方法的有效性。进行铝（阳极）和铁（阴极）作为电极的化学凝固和电凝的替补模型，并分别记录的总污泥分别为3105mg / L和1325mg / L.使用电凝来降低约57.3％的总污泥。使用电凝法测定污泥处理的预测治疗成本为RM 80,000-RM100,000（化学凝固的42.7％）。

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《USM-Japan International Research Center for Agricultural Sciences international symposium on "Biomass: Sustainable Natural Resource and Innovation for a Areener Future》|2012年||共5页
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Joanne Lee; Anees Ahmad;
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中图分类 X37-532;
关键词
Chemical mechanical polishing; Chemical coagulation; Electrocoagulation; Sludge; Wastewater;

机译：化学机械抛光;化学凝固;电凝;污泥;废水;

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机译：化学机械抛光（CMP）废水的电凝 - 朝向零废物的步骤
5. Mechanical aspects of the material removal mechanism in chemical mechanical polishing (CMP). [D] . Moon, Yongsik. 1999

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ELECTROCOAGULATION OF CHEMICAL MECHANICAL POLISHING (CMP) WASTEWATER- A STEP TOWARDS ZERO WASTE

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