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Innovative Algorithm and Software for Three-dimension Topography Evaluation in Laser-Micro Machining

机译：激光微加工三维地形评价的创新算法和软件

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摘要

Innovative algorithms and software evaluating the three-dimension topography in laser micro-machining are developed in this paper. First according to the features of the three-dimension surface consisted of micro peaks and pits, Gaussian curve parameters are presented and used to form a evaluation system with 22 parameters for three-dimension topography. Based on this, to completely and precisely evaluate the three-dimension topography, an assessment module for power spectral density is designed and implemented. Through integrating this module with the 22 parameters, a complete and precise evaluation system is built, which can evaluate the performance not only in vertical direction but also in horiz-ontal is obtained. In software, through using MATLAB/GUI latest interface to implement integration, the following functions are implemented: surface three-dimension topography rebuilding, signal noise reducing, assessment data extracting, roughness calculating, and two-dimensional frequency domain analyzing. Furthermore, with this software, through comparing the parameters and spectrum, it is easy to determine the frequency affecting the roughness, thus providing some clues on how to further reduce the surface roughness. Test results show that this software system can provide more accurate assessment for the surface three-dimension topography, and can be used to ultra-precision machining surface assessment.
机译：本文开发了创新算法和评估激光微加工三维地形的软件。首先根据三维表面的特征由微峰和凹坑组成，呈现高斯曲线参数，并用于形成具有22个参数的三维地形的评估系统。基于此，为了完全和精确地评估三维地形，设计和实现了用于功率谱密度的评估模块。通过将该模块与22个参数集成，构建了完整且精确的评估系统，可以在获得垂直方向上的性能，而且可以在垂直方向上进行评估。在软件中，通过使用MATLAB / GUI最新接口实现集成，实现了以下功能：表面三维地形重建，信号噪声降低，评估数据提取，粗糙度计算和二维频域分析。此外，通过该软件，通过比较参数和频谱，易于确定影响粗糙度的频率，从而提供了一些关于如何进一步降低表面粗糙度的线索。测试结果表明，该软件系统可以为表面三维地形提供更准确的评估，并可用于超精密加工表面评估。

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