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New plasma surface processing technology and its application

机译：新等离子体表面加工技术及其应用

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Plasma surface processing technology can improve the mechanical properties, the corrosion resistance and chemical properties of the parts; therefore it has been widely used in industrial field. Advanced plasma surface processing technology is also constantly innovation, high power pulsed magnetron sputtering technique has been studied and explored by many scholars in recent years, and also gradually began to be used in the industry. This paper mainly introduces the study of HiPIMS dynamic and application over the past ten years. The HiPIMS discharge mechanism research method and theory is summarized. And the influence of the preparation process parameters about voltage, pressure, pulse width and frequency to compound film performance is systematically described, a detection method for thin film by HiPIMS is also introduced. These will provide guidance for the preparation of reactive HiPIMS.
机译：等离子体表面加工技术可以提高部件的机械性能，耐腐蚀性和化学性质;因此，它已广泛用于工业领域。先进的等离子体表面加工技术也是不断创新的，近年来，许多学者们已经研究过高功率脉冲磁控溅射技术，也逐渐开始在行业中使用。本文主要介绍了过去十年的Hipims动态和应用的研究。总结了Hipims放电机制研究方法和理论。并且系统地描述了制备过程参数关于电压，压力，脉冲宽度和频率与复合膜性能的影响，还引入了HIPIMS的薄膜的检测方法。这些将为制备反应性Hipims提供指导。

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