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Study on Surface Texturization of Monocrystalline Silicon Wafers with Na_2CO_3 and NaHCO_3 Solutions

机译:用Na_2CO_3和NaHCO_3溶液研究单晶硅晶片表面纹理化

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The surface texturization of monocrystalline silicon wafers based on a mixture of sodium carbonate (Na_2CO_3) and sodium bicarbonate (NaHCO_3) solutions under different conditions have been studied in this work. A series of comparative experiments were made to indicate the dependence of hemispherical surface reflectivity on the Na_2CO_3 concentration, the NaHCO_3 concentration and the solution temperature. The results showed that the Na_2CO_3 concentration and the solution temperature have great effects on texture. In addition, the pyramid size and the surface average reflectivity decreased with the addition of NaHCO_3. On the basis of our experiments, it is shown that the optimized conditions are 24 wt% Na_2CO_3, 4 wt% NaHCO_3, 90°C and 30 min. Under these conditions, uniform pyramids are fabricated and the textured silicon surface exhibits a lower average reflectivity (about 12.34%) in the main range of solar spectrum (400 nm-800 nm). Because this texturization method is economical, nonhazardous and has low pollution, so we feel that it is an attractive alternative for the industrial production.
机译:在该工作中,研究了基于碳酸钠(Na_2CO_3)和碳酸氢钠(NaHCO_3)溶液的混合物的单晶硅晶片的表面纹理已经在该工作中研究。进行了一系列比较实验,以指示半球形表面反射率对Na_2CO_3浓度,NaHCO_3浓度和溶液温度的依赖性。结果表明,Na_2CO_3浓度和溶液温度对质地具有很大的影响。另外,通过添加NaHCO_3,金字塔尺寸和表面平均反射率降低。在我们的实验的基础上,显示优化的条件是24wt%Na_2CO_3,4wt%NaHCO_3,90℃和30分钟。在这些条件下,制造均匀的金字塔,织地用硅表面在太阳光谱(400nm-800nm)的主要范围内显示出较低的平均反射率(约12.34%)。因为这种纹理化方法是经济的,无危害的并且污染低,因此我们认为它是工业生产的有吸引力的替代品。

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