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Boron-terminated polystyrene as potential spin-on dopant for microelectronic applications

机译:硼终止的聚苯乙烯作为微电子应用的潜在旋掺杂剂

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Boron-terminated polystyrene with molecular weight ranging from 1800 to 18000 g/mol were synthesized for p-type doping of silicon substrates through spin-on technique. Several polymers were prepared using the ARGET-ATRP method using tert-butyl 2-bromoisobutyrate as initiator, changing monomer to initiator ratio and the reaction time. After polymerization, polystyrene samples were functionalized in order to end-cap the chains with a boron-containing molecule. Various polymers were characterized by SEC, to estimate M_n, M_w and PDI, by NMR (~1H and ~(13)C) in order to investigate the correct structure of the molecules and by TGA-GC-MS for knowing the thermal behavior and the amount of boron into the polymers.
机译:通过旋锁技术合成具有1800至18000g / mol的分子量范围为1800至18000g / mol的硼封端的聚苯乙烯,通过旋涂技术合成硅基板的p型掺杂。使用叔丁基2-溴异丁酸酯作为引发剂,将单体改变为引发剂比和反应时间,使用芳基ATRP方法制备几种聚合物。聚合后,使聚苯乙烯样品官能化以用含硼分子终止链。通过SEC的各种聚合物表征,以通过NMR(〜1H和〜(13)C)来估计M_N,M_W和PDI,以研究分子的正确结构和通过TGA-GC-MS来了解热行为和硼的量进入聚合物。

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