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首页> 外文会议>SPIE Conference on Automated Visual Inspection and Machine Vision >Optical inspection of noncooperative copper surface structures using multi- and hyperspectral acquisition systems
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Optical inspection of noncooperative copper surface structures using multi- and hyperspectral acquisition systems

机译：使用多级和高光谱采集系统的非铜表面结构的光学检查

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In order to enhance the efficiency of quality inspection of Direct Copper Bonded (DCB) structures an optical inspection using a 3D measuring system is conceivable. However, it is a challenging task to use 3D optical measurement techniques for diffuse reflective copper surfaces. This work deals with the optical detection of defects of the copper surface, using multi- and hyperspectral acquisition devices. Over a broad spectral range from the visual spectrum to the short-wave infrared (400 nm - 1700 nm) it was analysed which wavelengths provide good contrast ratios for the detection of flaws. For the inspection of the sample backside, the push-broom imager, operating in the VIS and NIR range (400 nm - 1000 nm), provides the best contrast ratio. An outstanding contrast is reached around 400 nm. Deposited particles on the front side of the DCB substrates are best detected by the filter wheel camera, which is sensitive in the visual and near infrared range. Outstanding contrast is reached with wavelengths around 640 nm. After evaluating the standard deviations of the gray values, it can be shown that defects differ clearly from flawless substrate areas under investigation with light of wavelengths 577 nm, 640 nm and 950 nm. Furthermore, the comparison between certain pixel spectra confirms that significant differences appear at the same three wavelengths. Regarding an automated inspection of defects, it is advisable to shift the pattern projection for the 3D correspondence analysis to the spectral ranges mentioned.
机译：为了提高直接铜键合（DCB）的质量检验效率（DCB）结构，可以想到使用3D测量系统的光学检测。然而，使用用于漫反射铜表面的三维光学测量技术是一个具有挑战性的任务。这项工作涉及使用多和超光谱采集装置的铜表面缺陷的光学检测。在视频范围内从视频到短波红外（400nm-1700nm），分析了哪些波长提供缺陷的良好对比度。对于样品背面的检查，在VIS和NIR范围（400nm - 1000nm）中操作的推扫帚成像器提供最佳对比度。突出的对比度约为400纳米。通过滤板相机最佳地检测DCB基板的前侧的沉积颗粒，其在视觉和近红外范围内敏感。波长达到640 nm的波长达到了突出的对比度。在评估灰度值的标准偏差之后，可以表明，从检测中，在波长577nm，640nm和950nm的光中，缺陷明显不同于研究。此外，某些像素光谱之间的比较证实了显着的差异出现在相同的三个波长。关于缺陷的自动检查，建议将3D对应分析的模式投影转换到所提到的光谱范围。

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