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首页> 外文会议>World Congress on Biosensors >Biofunctionalization effectiveness of titanium oxide thin films obtained with physical and chemical vapour deposition methods for optical label-free biosensing applications
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Biofunctionalization effectiveness of titanium oxide thin films obtained with physical and chemical vapour deposition methods for optical label-free biosensing applications

机译：用物理气相沉积方法获得光学标签生物传感应用的物理和化学气相沉积方法的生物官能化效果

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摘要

An influence of titanium oxide (TiO_x) deposition method, i.e., chemical (atomic layer deposition, ALD) and physical (reactive magnetron sputtering, RMS) vapor deposition, on the optical properties and surface chemical modification were investigated. TheTiOx film was used as a functional coating for enhancing sensing properties of two types of label-free optical sensors, i.e., localized surface plasmon resonance (LSPR) sensors based on gold nanoparticles and induced in optical fibre long-period gratings (LPGs) working in visible and infrared spectral range, respectively. We have found that independently on deposition method the films increase the sensitivity of LPG and enhance biofunctionalization capabilities.
机译：研究了氧化钛（TiO_X）沉积方法的影响，即化学（原子层沉积，ALD）和物理（反应磁控溅射，RMS）气相沉积在光学性质和表面化学改性上。用作功能涂料作为功能涂层，用于增强基于金纳米颗粒的局部表面等离子体共振（LSPR）传感器的两种类型的无标记光学传感器的感测性能，并在光纤长期光栅（LPG）中诱导可见光和红外光谱范围。我们发现，独立于沉积方法，薄膜增加了LPG的灵敏度，并增强了生物功能化能力。

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