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Research on Fatigue For AlN - Cu Plate Jointed By DBC Method For Semi-Conductor Substrate

机译:半导体基材DBC方法接合Aln - Cu板疲劳研究

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A elastic-plastic analysis of AlN/Cu jointing plate was performed by FEM to study the residual stress produced in the jointing-cooling process. This residual stress due to the difference of thermal expansion coefficient between ceramics and metal was analyzed, considering the presence of initial defects in ceramics. A static fatigue life was estimated based on a stress intensity factor of the supper-posed stress of the residual stress and the bending stress in ceramics of AlN/Cu jointing plate with the various thickness of Al_2O_3 layer.
机译:ALN / Cu连接板的弹性分析由FEM进行,以研究在连接冷却过程中产生的残余应力。 分析了由于陶瓷和金属之间的热膨胀系数差异而导致的残余应力,考虑到陶瓷中的初始缺陷存在。 基于静脉应力的应力强度因子估计静态疲劳寿命,以及在Aln / Cu连接板的陶瓷中具有各种厚度的Al_2O_3层的陶瓷陶瓷的应力强度因子。

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