Low-dimensional heterostructures obtaining from an intelligent material and carbon material on a silicon

机译：低维异质结构从硅上获得智能材料和碳材料

获取原文

页面导航

摘要
著录项
相似文献
相关主题

摘要

The results of the study of the technological regimes of the formation of a microcantilever beam of layered heterostructures based on the integration of smart material and silicon carbide are presented. Layers of silicon dioxide (SiO_2), silicon nitride, silicon carbide, and platinum (lower electrode) are successfully formed on a silicon substrate. The results of an experimental study of the Pt / PZT / Pt / SiC heterostructures parameters confirmed the technological compatibility of the layers and the promise of using these structures in sensors of dynamic deformation when creating new generation sensors, including those operating in heavy rocket conditions of space technology.

机译：介绍了基于智能材料和碳化硅的整合的层状异质结构形成的技术制定的研究结果。在硅衬底上成功地形成二氧化硅层（SiO_2），氮化硅，碳化硅和铂（下电极）。 PT / PZT / PT / SIC异质结构参数的实验研究结果证实了层的技术兼容性以及在创造新一代传感器时使用动态变形传感器中的这些结构的承诺，包括在重型火箭条件下运行的那些太空技术。

著录项

来源
《International School and Conference "Saint Petersburg OPEN"》|2020年|p1-594|共5页
会议地点
作者
S. A. Gurin; E. A. Pecherskaya; A.B. Fimin; K.O. Nikolaev; Y.V. Shepeleva; D.V. Artamonov;
展开▼
作者单位

展开▼
会议组织
原文格式 PDF
正文语种
中图分类计量学;
关键词

相似文献

外文文献
中文文献
专利

1. Silicon@carbon hollow core-shell heterostructures novel anode materials for lithium ion batteries [J] . Xiang-yang Zhou, Jing-jing Tang, Juan Yang, Electrochimica Acta . 2013,第Null期

机译：硅@碳空心核-壳异质结构用于锂离子电池的新型负极材料
2. Surface Modification of Low-dimensional Heterostructured Functional Materials with Dendrimers and their Properties of Organic-inorganic Nanocomposites [J] . Bin Guo, Bo Zhang, Qin Cong, Materials science forum . 2016,第期

机译：树枝状聚合物对低维异质结构功能材料的表面改性及其有机-无机纳米复合材料的性能
3. Silicon-based low-dimensional materials for thermal conductivity suppression: recent advances and new strategies to high thermoelectric efficiency [J] . Lai Huajun, Peng Ying, Gao Jie, Japanese journal of applied physics . 2021,第SA期

机译：基于硅的低维材料，用于导热抑制：最近的高热电效率的进步和新策略
4. Low-dimensional heterostructures obtaining from an intelligent material and carbon material on a silicon [C] . S. A. Gurin, E. A. Pecherskaya, A.B. Fimin, International School and Conference "Saint Petersburg OPEN" . 2020

机译：低维异质结构从硅上获得智能材料和碳材料
5. Silicon/silicon germanium heterostructures: Materials, physics, quantum functional devices and their integration with heterostructure bipolar transistors. [D] . Chung, Sung-Yong. 2005

机译：硅/硅锗异质结构：材料，物理学，量子功能器件及其与异质结构双极晶体管的集成。
6. New 2D Structural Materials: Carbon–GalliumNitride (CC–GaN) and Boron–Gallium Nitride (BN–GaN)Heterostructures—Materials Design Through Density FunctionalTheory [O] . Van W. Elloh, Abu Yaya, G. Gebreyesus, 2019

机译：新型2D结构材料：碳镓氮化物（CC-GaN）和硼-氮化镓（BN-GaN）异质结构—通过密度函数进行材料设计理论
7. Interaction of femtosecond laser radiation with carbon materials: exfoliation of graphene structures and synthesis of low-dimensional carbon structures [O] . D. Abramov, S. Arakelian, D. Kochuev, 2016

机译：碳材料飞秒激光辐射的相互作用：石墨烯结构的剥离和低维碳结构的合成

Low-dimensional heterostructures obtaining from an intelligent material and carbon material on a silicon

摘要

著录项

相似文献

相关主题

期刊订阅