A plasma-chemical reactor of coupled vacuum-arc and ion-plasma processes for protective coatings formation based on titanium nitride

机译：基于氮化钛的保护涂层耦合真空弧和离子等离子体工艺的等离子体 - 化学反应器

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A plasma-chemical reactor based on the principle of coupling of gas-discharge processes in a VU-1B vacuum installation has been developed. This plasma-chemical reactor combine vacuum-arc evaporation of titanium in a nitrogen-containing plasma and ion-plasma sputtering of copper with the formation of copper vapor. The basis of this method of coatings deposition is the principle of dosing the injection copper vapor into the region of TiN synthesis through a separating diaphragm with a variable metering aperture, which prevents penetration of a titanium vapor into the copper cathode of the magnetron. The synthesis of TiN coatings in copper vapors has been carried out with the formation of nanostructured composite TiN-Cu coatings.

机译：已经开发了一种基于VU-1B真空安装中的气体放电过程耦合原理的等离子体化学反应器。该等离子体化学反应器将钛的真空弧蒸发与铜蒸气形成的铜的含氮等离子体和离子等离子体溅射相结合。这种涂层沉积方法的基础是通过具有可变计量孔的分离隔膜将注射铜蒸气分解到锡合成区域的原理，这防止了钛蒸汽渗透到磁控管的铜阴极中。通过形成纳米结构复合锡-Cu涂料，进行了铜蒸汽中锡涂层的合成。

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《International Conference "Gas Discharge Plasmas and Their Applications"》|2020年|p489-971|共6页
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D B-D Tsyrenov; A P Semenov; N N Smirnyagina; I A Semenova;
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1. An Apparatus for Vacuum Deposition of Composite TiN-Cu Coatings Using Coupled Vacuum-Arc and Ion-Plasma Processes [J] . Semenov A. P., Tsyrenov D. B. -D., Semenova I. A. Instruments and Experimental Techniques . 2017,第6期

机译：一种使用耦合真空电弧和离子等离子体工艺真空沉积复合锡铜涂层的装置
2. Formation features of composite coatings based on titanium nitride by method of vacuum-arc evaporation and magnetron sputtering [J] . D B-D Tsyrenov, A P Semenov, N N Smirnyagina, Journal of Physics: Conference Series . 2018,第3期

机译：真空电弧蒸发磁控溅射氮化钛复合涂层的形成特征
3. Formation features of composite coatings based on titanium nitride by method of vacuum-arc evaporation and magnetron sputtering [J] . D B-D Tsyrenov, A P Semenov, N N Smirnyagina, Journal of Physics: Conference Series . 2018,第3期

机译：真空电弧蒸发磁控溅射氮化钛复合涂层的形成特征
4. A plasma-chemical reactor of coupled vacuum-arc and ion-plasma processes for protective coatings formation based on titanium nitride [C] . D B-D Tsyrenov, A P Semenov, N N Smirnyagina, International Conference "Gas Discharge Plasmas and Their Applications" . 2020

机译：基于氮化钛的保护涂层耦合真空弧和离子等离子体工艺的等离子体 - 化学反应器
5. Adhesion measurements and chemical and microstructural characterization at interfaces of titanium nitride and titanium aluminum nitride coatings on stainless steel, inconel and titanium alloys. [D] . James, Robert Dallas. 1997

机译：在不锈钢，铬镍铁合金和钛合金上的氮化钛和氮化铝钛涂层的界面处进行粘附力测量以及化学和微观结构表征。
6. Ability of adhesion and biofilm formation of pathogens of periprosthetic joint infections on titanium-niobium nitride (TiNbN) ceramic coatings [O] . Alessandro Bidossi, Marta Bottagisio, Roberta De Grandi, 2020

机译：氮化钛铌（TiNbN）陶瓷涂层上假体周围关节感染病原体的粘附能力和生物膜形成能力
7. Development of niobium based coatings prepared by ion-plasma vacuum-arc deposition for medical applications [O] . Ivan Misiruk, Anton Taran, Igor Garkusha, 2020

机译：通过离子等离子体真空电弧沉积制备的铌基涂层的研制
8. Protective Coatings for Titanium and Steel Mortar Components. Phase I. Anti-Galling Coatings for Titanium Mortar Bipod Components [R] . Levy, M., Romolo, J. B. 1961

机译：钛和钢砂浆组件的防护涂料。阶段I.用于钛砂浆双组分的抗凝涂层

A plasma-chemical reactor of coupled vacuum-arc and ion-plasma processes for protective coatings formation based on titanium nitride

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