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首页> 外文会议>IEEE Nuclear Science Symposium Conference Record;International Workshop on Room-Temperatureemiconductor X-ray and Gamma-ray Detectors;Medical Imaging Conference >Development and evaluation of a high resolution CMOS Image Sensor with 17 #x03BC;m #x00D7; 17 #x03BC;m pixel size for X-ray imaging
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Development and evaluation of a high resolution CMOS Image Sensor with 17 #x03BC;m #x00D7; 17 #x03BC;m pixel size for X-ray imaging

机译：具有17＆＃x03bc的高分辨率CMOS图像传感器的开发与评估; M＆＃X00D7; 17＆＃x03bc; m像素大小用于X射线成像

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摘要

In this research, we designed and fabricated a CIS (CMOS Image Sensor) with 17 μm × 17 μm pixel size and 190 × 190 pixels using 0.25 μm standard CMOS process as a testversion sample for developing high resolution X-ray image sensors. Active pixel sensors, area efficient sample and hold circuits, and a switched capacitor amplifier are integrated in a single chip. A unit pixel of the sensor consists of a photodiode and a 3-transitor active pixel structure. A sample and hold circuit is designed to reduce silicon area by including only one capacitor. Finally, a current mirrored operational transconductance amplifier is used to construct a switched capacitor amplifier. Also, in order to analyze the characteristics of the CIS and obtain images, we developed a data acquisition system. The system is responsible for communicating with a personal computer as well as controlling the CIS and an external ADC. The evaluation procedure of the CIS is divided into two categories: one is to investigate the performance of the CIS itself, and the other is to evaluate the quality of the obtained image. We measured not only the linearity, sensitivity and charge-to-voltage conversion gain of the CIS, but also the spatial resolution of the X-ray image acquired by the CIS coupled with a CsI(Tl) scintillator.
机译：在这项研究中，我们设计和制作了一个CIS（CMOS图像传感器），17＆＃x03bc; m＆＃x00d7; 17＆＃x03bc; m像素大小和190＆＃x00d7;使用0.25＆＃x03bc的190像素; M标准CMOS工艺作为用于开发高分辨率X射线图像传感器的测试样品。有源像素传感器，区域有效的样品和保持电路，以及开关电容放大器集成在单个芯片中。传感器的单位像素由光电二极管和3级有源像素结构组成。样品和保持电路设计成通过仅包括一个电容器来减少硅面积。最后，使用电流镜像操作跨导放大器来构造开关电容放大器。此外，为了分析CIS的特征并获得图像，我们开发了一种数据采集系统。该系统负责与个人计算机进行通信以及控制CIS和外部ADC。 CIS的评估程序分为两类：一个是调查CIS本身的性能，另一类是评估所获得的图像的质量。我们不仅测量了CIS的线性，灵敏度和电荷到电压转换增益，而且测量了由CIS获取的CIS获取的X射线图像的空间分辨率与CSI（TL）闪烁体耦合。

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