• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>International Multi-Conference on Systems, Signals amp;amp;amp;amp;amp;amp; Devices >Induced-Stress Analysis of SU-8 Polymer Based Single Mass 3-Axis Piezoresistive MEMS Accelerometer
【24h】

Induced-Stress Analysis of SU-8 Polymer Based Single Mass 3-Axis Piezoresistive MEMS Accelerometer

机译：SU-8聚合物基单质量3轴压阻式MEMS加速度计的诱导 - 应力分析

获取原文
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

This paper presents the induced-stress analysis of an SU-8 polymer based 3-axis piezoresistive MEMS accelerometer having a single proof mass along with proposed fabrication process flow. Polymer accelerometers are simple to fabricate and have better sensitivity because of their lower Young's modulus. It is also easy to integrate any highly sensitive piezoresistive material as a layer to further enhance the performance. In this work, structural design and push-pull mechanism of the beam and its use to achieve the desired results have been explained. Using basic structural analysis, locations of the maximum induced stress are identified. For acceleration of 100 g and 1 g, the proposed design has been investigated for the stress field in the structure and shown the improvement by comparing the performance with two published design presented in the paper. The proposed fabrication process is compatible with several piezoresistive materials such as ZnO nanorods, graphene and carbon nanotubes (CNTs).
机译：本文介绍了基于SU-8聚合物的基于3轴压阻式MEMS加速度计的诱导应力分析，具有单一防尘和所提出的制造工艺流程。聚合物加速度计简单易于制造，并且由于较低的杨氏模量而具有更好的敏感性。还容易将任何高敏感的压阻材料作为层集成，以进一步提高性能。在这项工作中，已经解释了梁的结构设计和推拉机构及其用于实现所需结果的用途。使用基本结构分析，鉴定了最大诱导应力的位置。对于100g和1g的加速度，已经研究了结构中的应力场，并通过比较了纸张中提出的两个公开设计的性能来研究了改进。所提出的制造工艺与多种压阻材料相容，例如ZnO纳米棒，石墨烯和碳纳米管（CNT）。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号