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Efficiency of the drag stage application in the multistage turbomolecular vacuum pump

机译:多级涡轮分子真空泵中拖曳阶段应用的效率

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A method for calculating the main parameters of a multistage turbomolecular vacuum pump (TMP) providing the main pumping parameters, including the ultimate pressure, the pumping speed, and compression ratio in the molecular gas flow regime has been developed. As a result of the calculation of the main parameters of multistage TMP according to the proposed method, the pumping curve of the drag stage was obtained. The pumping curve of TMP was also obtained taking into account the influence of the main parameters of the drag stage in the molecular regime of gas flow.
机译:已经开发了一种用于计算提供主泵送参数的多级涡轮分子真空泵(TMP)的主参数的方法,包括分子气流状态下的最终压力,泵送速度和压缩比。 由于根据所提出的方法计算多级TMP的主要参数,获得了拖动阶段的泵送曲线。 还考虑了拖动阶段的主要参数在气流的分子制度中的影响,也获得了TMP的泵送曲线。

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