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Deep-etched fused silica gratings and applications

机译：深蚀刻熔融石英光栅及其应用

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Deep-etched fused silica grating is a kind of high density phase gratings whose surface are etched into an optimized depth for achieving a series of novel functions, such as high efficient diffraction at the -1 order, polarizing beam splitting, 1x2, 1x3 beam splitting, etc.. Since deep-etched fused silica grating is made of pure dielectric material of fused silica, so it has a high laser damage threshold for high power laser applications. We fabricated the polarizing beam splitter of the fused silica grating and realized the even and odd modes for analysis of fused silica grating. We gave the generalized equations for describing the performance of polarizing beam splitting and high efficient diffraction at the -1 order. We gave the analytic equation of 1 x3 diffraction, which is impossible to obtain with the previous rigorously coupled wave method. For fabrication of deep-etched fused silica gratings, holographic recording, lithographic technique, and inductively coupled plasma etching are used to make the deep-etched gratings. Deep-etched gratings have a variety of practical applications. It can be used for demultiplexing optical signals in DWDM optical fiber communications. It can also be used as a pulse compressor of femtosecond or picosecond laser pulses. It can also be used as polarizing beam splitter, high efficient diffraction for spectrometer, etc.. Deep-etched fused silica gratings have a bright future for practical applications.
机译：深蚀刻熔融石英光栅是一种高密度相位光栅，其表面被蚀刻到最佳深度，以实现一系列新颖的功能，例如-1级高效衍射，偏振分束，1x2、1x3分束由于深蚀刻的熔融石英光栅由熔融石英的纯介电材料制成，因此对于高功率激光应用，它具有较高的激光损伤阈值。我们制造了熔融石英光栅的偏振分束器，并实现了用于熔融石英光栅分析的偶模和奇模。我们给出了用于描述-1阶偏振分束和高效衍射性能的广义方程。我们给出了1 x3衍射的解析方程，这是以前的严格耦合波方法无法获得的。对于深蚀刻的熔融石英光栅的制造，全息记录，光刻技术和电感耦合等离子体蚀刻被用于制造深蚀刻的光栅。深蚀刻光栅具有多种实际应用。它可用于在DWDM光纤通信中多路分解光信号。它也可以用作飞秒或皮秒激光脉冲的脉冲压缩器。它也可以用作偏振分束器，光谱仪的高效衍射等。深蚀刻熔融石英光栅在实际应用中有光明的前景。

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