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Non-digitized diffractive beam splitters for high-throughput laser materials processing

机译：用于高通量激光材料加工的非数字衍射分束器

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We report a non-digitized diffractive beam splitter with a split count of 45, a 95% splitting efficiency, and a 0.90 splitting uniformity. The splitter was iteratively designed and was created on fused silica by laser writing lithography. Antireflection coatings were added to the splitter to ensure high efficiency. This splitter was applied to the manufacture of inkjet printer heads, in which silicon wafers were drilled with a 532-nm, nanosecond pulse laser with an average output of 10 W and were wet-etched to produce microfluidic channels. We also discuss large beam arrays for process throughput and subwavelength structures formed on the splitter for efficient laser power use.
机译：我们报告了一种非数字化衍射分束器，其分束数为45，分束效率为95％，分束均匀度为0.90。分流器经过迭代设计，并通过激光刻蚀在熔融石英上制成。在分光镜上添加了防反射涂层，以确保高效率。该分离器用于喷墨打印机头的制造，在该打印机中，用平均输出功率为10 W的532 nm纳秒脉冲激光钻硅晶片，并进行湿法蚀刻以产生微流体通道。我们还将讨论用于处理量的大光束阵列以及在分离器上形成的亚波长结构，以有效利用激光功率。

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