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首页> 外文会议>International Conference on Advances in Construction Machinery and Vehicle Engineering >Effects of Temperature Fluctuations on the Performance and Coupled-field Analysis of a Micromachined Gyroscope
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Effects of Temperature Fluctuations on the Performance and Coupled-field Analysis of a Micromachined Gyroscope

机译：温度波动对微加工陀螺性能和耦合场分析的影响

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摘要

This paper presents the modeling and coupled-field analysis for a tuning fork vibratory microgyroscope fabricated by the bulk silicon micromachining technology. The effects of environmental thermal fluctuations on the microgyroscope are considered and analysed by a nonlinear analysis process. Numerical simulations show that the frequencies and output of the microgyroscope have slight deviations when the microgyroscope works at different environmental temperature. The deviations of the frequencies and dynamic characteristics are calculated accurately, which provides a reference for the design of temperature compensation method and robust structural design for the microgyroscope.
机译：本文介绍了由散装硅微加工技术制造的调谐叉振动微仪的建模和耦合场分析。通过非线性分析过程考虑并分析了环境热波动对微仪的影响。数值模拟表明，当微仪表在不同的环境温度下工作时，微缀腔的频率和输出具有轻微的偏差。精确计算频率和动态特性的偏差，为微纱镜的温度补偿方法和鲁棒结构设计提供了一种参考。

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