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A Large Deflection Translatory Actuator for Optical Path Length Modulation

机译：用于光程长度调制的大挠度平移执行器

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摘要

A novel translational micro mirror with a circular shape of 3 mm diameter and oscillation frequencies of 500 Hz and 1000 Hz is presented including a design study based on analytical and numerical calculations. The study takes mechanical limits like stress and shock resistivity into account as well as fabrication issues resulting in the design points presented. Considerations and results of this study including stress limits for single crystalline silicon and a FE analysis of the main oscillation mode of the resonant structure will be illustrated. Based on an SOI process with 30 μm thick and highly doped single crystalline silicon several devices were fabricated. For the characterization of the devices a Michelson interferometer set-up was used which allows determining the voltage-deflection curves as a function of the air pressure. Deflections of more than ± 50 μm for the 500 Hz device and ± 85 μm for the 1000 Hz have been achieved at a pressure of 10 Pa. The target is at ± 250 蘭 and ± 180 μm amplitude. In the outlook packaging requirements and approaches will be shown.
机译：提出了一种新颖的平移微镜，其直径为3 mm的圆形，振荡频率为500 Hz和1000 Hz，包括基于解析和数值计算的设计研究。这项研究考虑到了机械极限，例如应力和抗冲击性，以及制造问题，从而提出了设计要点。将说明包括单晶硅应力极限在内的这项研究的考虑和结果，并对谐振结构的主要振荡模式进行有限元分析。基于厚度为30μm的高掺杂单晶硅的SOI工艺，制造了几种器件。为了表征设备，使用了迈克尔逊干涉仪装置，该装置允许确定电压偏转曲线与气压的函数关系。在10 Pa的压力下，500 Hz器件的挠度大于±50μm，而1000 Hz器件的挠度大于±85μm。目标是在±250兰和±180μm振幅下。在外观中将显示包装要求和方法。

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