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Active focusing device based on MOEMS technology

机译：基于MOEMS技术的主动对焦装置

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摘要

A MEMS based device for active focus control is presented. The concept has been developed using coupled field FEM simulation. The focus length is adjusted by a reflective membrane which is electro-statically deformed. Using a special ring shaped counter electrode and an optimized weak membrane suspension, a perfect parabolic shape of the deformed membrane is obtained over a very large diameter at reasonable low driving voltages. The counter electrode is part of the chip package which simplifies the fabrication process. Using SOI-technology, the realization of stress free membranes with a diameter up to 10 mm has been proven. The device can be used in active optical applications where large numerical apertures are needed. Potential applications are e.g. confocal microscopy or scanning applications for focus control. In this paper, detailed results of the design optimization process are presented.
机译：提出了一种用于主动聚焦控制的基于MEMS的设备。该概念是使用耦合场有限元模拟开发的。通过静电变形的反射膜调节焦距。使用特殊的环形对电极和优化的弱膜悬浮液，可以在合理的低驱动电压下，以非常大的直径获得变形膜的理想抛物线形状。对电极是芯片封装的一部分，可简化制造过程。使用SOI技术，已证明可以实现直径最大10 mm的无应力膜。该器件可用于需要大数值孔径的有源光学应用中。潜在的应用例如共聚焦显微镜或扫描应用进行聚焦控制。本文介绍了设计优化过程的详细结果。

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