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Tunable Fabry-Perot filters operating in the 3 to 5 μm range for infrared micro-spectrometer applications

机译：可调谐的Fabry-Perot滤光片，工作在3至5μm范围内，适用于红外微光谱仪应用

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摘要

In this article the design, fabrication and characterization of micro-Fabry-Perot filters operating in the mid-wavelength infrared range is presented. Using surface micromachining techniques, low temperature silicon nitride based structures with distributed Bragg mirrors made of Ge/SiO/Ge layers have been fabricated and tested, both mechanically and optically. The membrane/mirror deflection has been measured using an optical profilometer and is estimated to be of the order of 800nm with voltage bias up to 17V while still preserving good mirror parallelism. The respective optical transmission peak shifted from 4.5 μm to 3.6 μm. Without antireflection coating at the back of the silicon substrate ～ 50% maximum transmission has been measured at the resonance peaks. The FWHM was measured to be 210+/-20nm, which is ～ 20% larger than estimated theoretically. In agreement with theoretical modeling, after crossing 1/3 of the cavity length, the membrane/mirror structure has been found to enter into an unstable region followed by snap-down to the bottom mirror surface. In order to prevent this detrimental effect, membranes with anti-stiction bumps have been fabricated demonstrating repeatable structure recovery from the stage of full collapse.
机译：本文介绍了在中波长红外范围内工作的微法布里-珀罗滤波器的设计，制造和特性。使用表面微机械加工技术，已经在机械和光学上制造和测试了具有由Ge / SiO / Ge层制成的分布式布拉格镜的低温氮化硅基结构。膜/镜面偏转已使用光学轮廓仪进行了测量，估计电压约为800nm，偏置电压高达17V，同时仍保持良好的镜面平行度。各个光透射峰从4.5μm转变为3.6μm。在硅基板的背面没有防反射涂层的情况下，在共振峰处测得的最大透射率约为50％。 FWHM被测得为210 +/- 20nm，比理论上估计的大20％。与理论模型一致，在超过腔长度的1/3之后，已发现膜/镜结构进入不稳定区域，然后迅速下降到底部镜面。为了防止这种有害作用，已经制造了具有抗粘滞隆起的膜，其表明从完全塌陷阶段开始可重复的结构恢复。

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