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Chip-scale Integrated Driver for Electrostatic DM Control

机译：用于静电DM控制的芯片级集成驱动器

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A complementary metal oxide semiconductor (CMOS) electronics driver chip to control a microelectromechanical (MEMS) deformable mirror (DM) has been developed. MEMS DMs have a wide range of uses in correcting time-varying aberrations in microscope and telescope imaging, laser beam forming applications and secure free-space communications. MEMS DMs that have been demonstrated are often quite small and consume very little power. Correspondingly, small electronic drivers would allow adaptive optics systems of unprecedented compactness. With the advances in CMOS technology, it has become possible to design and fabricate electronics operable at higher voltages than those in traditional integrated circuits. Since MEMS structures often require relatively high operating voltages to energize electrostatic actuators, these high voltage CMOS fabrication processes offer promise for miniaturization of the corresponding drivers. This paper introduces an integrated electronic driver developed to operate one particular type of MEMS mirror structure, requiring more than a hundred independently addressable control channels, each of which can be varied from ground potential to hundreds of volts.
机译：已经开发了用于控制微机电（MEMS）可变形镜（DM）的互补金属氧化物半导体（CMOS）电子驱动器芯片。 MEMS DM在校正显微镜和望远镜成像中的时变像差，激光束形成应用和安全的自由空间通信中具有广泛的用途。已经证明的MEMS DM通常很小，功耗也很小。相应地，小型电子驱动器将使自适应光学系统具有空前的紧凑性。随着CMOS技术的进步，已经可以设计和制造可在比传统集成电路更高的电压下工作的电子设备。由于MEMS结构通常需要相对较高的工作电压来激励静电致动器，因此这些高压CMOS制造工艺为相应驱动器的小型化提供了希望。本文介绍了一种集成电子驱动器，该电子驱动器开发用于操作一种特定类型的MEMS反射镜结构，需要一百多个独立可寻址的控制通道，每个通道都可以从地电位到数百伏特变化。

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