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Lumped model for the comb-finger capacitance and electrostatic force

机译：梳指电容和静电力的集总模型

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摘要

Comb-finger structure has been widely used in MEMS device as actuator and capacitive sensing unit. We can quite often find that the capacitance of and electrostatic force between a pair of the fingers are calculated by parallel plate model. This is certainly the simplest and the easiest solution, but with very low accuracy. The analytic method with reasonable accuracy is generally necessary for design engineers because it can give a quick estimation of the design and correct insight into the performance of the design. In this paper, the long comb-finger structure is analyzed. The multi-body-system, e.g., comb-finger above the ground, has been simplified. The fringe field effect is taken into account. Applying semi-empirical equations, we have developed analytic models for calculating capacitance and electrostatic force for various comb-finger structures. The results from the analytic models are compared with simulation results from commercial simulation software.
机译：梳指结构已被广泛用于MEMS器件中作为致动器和电容传感单元。我们经常可以发现，一对手指之间的电容和静电力是通过平行板模型计算的。这当然是最简单，最简单的解决方案，但是准确性很低。设计工程师通常需要具有合理准确性的分析方法，因为它可以快速估计设计并正确了解设计性能。本文分析了长梳指结构。简化了多体系统，例如地面上的梳指。考虑了边缘场效应。应用半经验方程，我们开发了用于计算各种梳指结构的电容和静电力的解析模型。将分析模型的结果与商业仿真软件的仿真结果进行比较。

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