Simulation and Design on Structure for Experimental Verification of Dielectric Charging of Millimeter-wave MEMS Switches

机译：毫米波MEMS开关介电充电实验验证结构的仿真与设计。

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Lifetimes of RF MEMS (Micro-electro-mechanical systems) capacitive switches are hindered by dielectric charging effects. A novel test structure for experimental verification of millimeter-wave MEMS switch dielectric accumulation charge is presented. The structure, which is designed using EM simulation software CST Microwave Studio and HFSS, consists of Coplanar Waveguide (CPW), a 2-way power divider and two symmetric capacitive MEMS switches. The input signal is equally divided into two output signals in the 2-way power divider due to symmetry, and the isolation between two output ports the power divider of is less than -48dB at 35GHz. The designed millimeter-wave capacitive MEMS shunt switch has 0.076dB insertion and -55dB isolation at 35GHz. The two symmetric capacitive MEMS switches in this structure can provide a strong comparability for different switch dielectric accumulation charge situations.

机译：介电充电效应会阻碍RF MEMS（微机电系统）电容开关的使用寿命。提出了一种用于毫米波MEMS开关介电累积电荷实验验证的新型测试结构。该结构是使用EM仿真软件CST Microwave Studio和HFSS设计的，由共面波导（CPW），2路功率分配器和两个对称电容MEMS开关组成。由于对称性，输入信号在2路功率分配器中被平均分为两个输出信号，功率分配器在两个输出端口之间的隔离度在35GHz时小于-48dB。设计的毫米波电容式MEMS并联开关在35GHz时具有0.076dB的插入和-55dB的隔离度。此结构中的两个对称电容MEMS开关可为不同的开关电介质累积电荷情况提供强大的可比性。

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来源
《International Conference of Chinese Society of Micro-Nano Technology;Annual Conference of the Chinese Society of Micro-Nano Technology》|2010年|p.158-163|共6页
会议地点 Xian(CN);Xian(CN)
作者
Yi Zhou; Xiaopin Liao; Jianbin Xiao;
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作者单位

Key laboratory of MEMS of Ministry of Education, Southeast University, Nanjing, 210096, China;

Key laboratory of MEMS of Ministry of Education, Southeast University, Nanjing, 210096, China;

Key laboratory of MEMS of Ministry of Education, Southeast University, Nanjing, 210096, China;

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会议组织
原文格式 PDF
正文语种 eng
中图分类光学仪器;微电子学、集成电路（IC）;
关键词
millimeter-wave; power divider; MEMS switch; dielectric charging;

机译：毫米波功率分配器； MEMS开关介电充电;

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8. Top vs. Bottom Charging of the Dielectric in RF MEMS Capacitive Switches (Preprint) [R] . Peng, Z. , Yuan, X. , Hwang, J. C. , 2006

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Simulation and Design on Structure for Experimental Verification of Dielectric Charging of Millimeter-wave MEMS Switches

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