Lateral RF MEMS Switch Based on Surface Micromachining Process

著录项

• 来源
  《International Conference of Chinese Society of Micro-Nano Technology;Annual Conference of the Chinese Society of Micro-Nano Technology》|2010年|p.457-460|共4页
• 会议地点 Xian(CN);Xian(CN)
• 作者

  DU Guo-ping; ZHU Jian; YU Yuan-wei; Jia Shi-xing; Jiang Li-li;

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• 作者单位

  Nanjing Electronic Devices Institute,Nanjing,210016,PRC;

  Nanjing Electronic Devices Institute,Nanjing,210016,PRC,Notional Key Lab of Science and Technology on Monolithic Integrated Circuits and Modules,Nanjing,210016, PRC;

  Nanjing Electronic Devices Institute,Nanjing,210016,PRC,Notional Key Lab of Science and Technology on Monolithic Integrated Circuits and Modules,Nanjing,210016, PRC;

  Nanjing Electronic Devices Institute,Nanjing,210016,PRC;

  Nanjing Electronic Devices Institute,Nanjing,210016,PRC;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 光学仪器;微电子学、集成电路（IC）;
• 关键词

  RF MEMS; switch; lateral contact;

  机译：RF MEMS;开关;横向接触;