Micro Magnetic Field Sensor Based On Terfenol-D/PZT/Terfenol-D Magnetoelectric Composites

机译：基于Terfenol-D / PZT / Terfenol-D磁电复合材料的微磁场传感器

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摘要

A new type of magnetic sensor based on magnetoelectric(ME) composites has been designed and fabricated. The ME composites has a Terfenol-D/PZT/Terfenol-D structure and its ME coefficient is 0.36 V/cm Oe at room temperture. The sensor has AC magnetic measurement ranges from 0.02 Oe to 12 Oe, reaches a sensitivity of 5 ×10~(-3) Oe and has a flat response within 15 kHz. The sensor is equipped with a pre-amplifier and an Root Mean Square(RMS) value converter.

机译：设计并制造了一种基于磁电复合材料的新型磁传感器。 ME复合材料具有Terfenol-D / PZT / Terfenol-D结构，室温下的ME系数为0.36 V / cm Oe。该传感器的交流磁测量范围为0.02 Oe至12 Oe，灵敏度达到5×10〜（-3）Oe，并且在15 kHz范围内具有平坦响应。该传感器配备了前置放大器和均方根（RMS）值转换器。

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来源
《International Conference of Chinese Society of Micro-Nano Technology;Annual Conference of the Chinese Society of Micro-Nano Technology》|2010年|p.190-194|共5页
会议地点 Xian(CN);Xian(CN)
作者
Yang Zheng; Dan Xie; Jing Ma; Tianling Ren; Litian Liu;
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作者单位

Institute of Microelectronics, Tsinghua University, Beijing, CHINA;

Institute of Microelectronics, Tsinghua University, Beijing, CHINA;

Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, CHINA;

Institute of Microelectronics, Tsinghua University, Beijing, CHINA;

Institute of Microelectronics, Tsinghua University, Beijing, CHINA;

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会议组织
原文格式 PDF
正文语种 eng
中图分类光学仪器;微电子学、集成电路（IC）;
关键词
ME composites; magnetic sensor; PZT; tefernol-D;

机译：ME复合材料；磁传感器PZT;替铁酚D;

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专利

1. Investigations on Magnetoelectric Composites Based on Terfenol-D & PZT in an Alternating Magnetic Field Conditions [J] . KALETA Jerzy, LEWANDOWSKI Daniel, MECH Rafal, Diffusion and Defect Data. Solid State Data, Part B. Solid State Phenomena . 2016,第Null期

机译：交替磁场条件下基于Terfenol-D和PZT的磁电复合材料的研究
2. Effect of magnetic-field orientation on dual-peak phenomenon of magnetoelectric coupling in Ni/PZT/Terfenol-D composites [J] . Longfei Niu, Yang Shi, Yuanwen Gao AIP Advances . 2019,第4期

机译：磁场取向对Ni / PZT / Terfenol-D复合材料中磁电耦合双峰现象的影响
3. Single dc magnetic field tunable electromechanical resonance in Terfenol-D/PZT/Terfenol-D trilayer composites [J] . Wang Wei, Ye JingJing, Wu Jie, Journal of magnetism and magnetic materials . 2014,第OCTa期

机译：Terfenol-D / PZT / Terfenol-D三层复合材料的单直流磁场可调谐机电共振
4. Micro Magnetic Field Sensor Based On Terfenol-D/PZT/Terfenol-D Magnetoelectric Composites [C] . Yang Zheng, Dan Xie, Jing Ma Annual Conference of the Chinese Society of Micro-Nano Technology . 2011

机译：基于Terfenol-D / PZT / Terfenol-D磁电复合材料的微磁场传感器
5. Design, fabrication and analysis of a Terfenol-D based magnetostrictive external cavity diode laser sensor with an advanced signal processing capability. [D] . Chung, Wing Chiu Russell. 1999

机译：具有先进信号处理能力的基于Terfenol-D的磁致伸缩外腔二极管激光传感器的设计，制造和分析。
6. Equivalent Circuit Model of Low-Frequency Magnetoelectric Effect in Disk-Type Terfenol-D/PZT Laminate Composites Considering a New Interface Coupling Factor [O] . Guofeng Lou, Xinjie Yu, Shihua Lu 2017

机译：考虑新的界面耦合因子的盘形Terfenol-D / PZT层状复合材料的低频磁电效应等效电路模型
7. Effect of magnetic-field orientation on dual-peak phenomenon of magnetoelectric coupling in Ni/PZT/Terfenol-D composites [O] . Longfei Niu, Yang Shi, Yuanwen Gao 2019

机译：磁场取向对Ni / PZT / Terfenol-D复合材料中磁电耦合双峰现象的影响
8. Micromachined Magnetic-Field Sensor Based on an Electron Tunneling Displacement Transducer; Journal article [R] . DiLella, D., Whitman, L. J., Colton, R. J., 2000

机译：基于电子隧道位移传感器的微机械磁场传感器;杂志文章

Micro Magnetic Field Sensor Based On Terfenol-D/PZT/Terfenol-D Magnetoelectric Composites

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