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Two-dimensional motor based on surface acoustic wave

机译：基于声表面波的二维电动机

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摘要

With the development of high precision processing, the miniaturization demand of motors with super-precision positioning and simple fabrication become an urgent problem. This paper illustrates a surface acoustic wave (SAW) motor for two-dimensional positioning. The SAW motor include a SAW stator and a slide. In order to realize the two-dimensional moving, four Interdigital Transducer (IDTs) are fabricated on the four directions of a 0.5-mm thick, 128°YX-LiNbO_3 substrate. Comparing the aluminum material, the copper material selected to be used as IDT in our experiment has many advantages. Each of the four copper IDTs has 10 straight finger pairs in a simple repeating pattern, the IDT aperture is 10mm and the pitch is 400μm. The SAW stator is fabricated by the lift-off process. The dimension of the device is 29mm (width) X29mm (length). The slide consists of three ruby balls with the diameter of lmm and an plastic disc with the thickness of 0.5mm and the diameter is 8mm. With the four radio frequency driving sources, two-dimensional motion is possible. The maximum speed of the slide that was placed on the SAW propagating surface was 5mm/s when the applied driving power was 28W and the applied driving frequency was 9.6MHz. The experiments indicate the two-dimensional motor based on SAW would be applicable to miniature motor and improve the resolution.
机译：随着高精度加工的发展，具有超精密定位和简单制造的电动机的小型化需求成为迫切的问题。本文说明了用于二维定位的表面声波（SAW）电动机。 SAW电动机包括SAW定子和滑动件。为了实现二维移动，在0.5毫米厚，128°YX-LiNbO_3基板的四个方向上制作了四个叉指换能器（IDT）。与铝材料相比，在我们的实验中选择用作IDT的铜材料具有许多优势。四个铜制IDT中的每一个都有10个直指对，呈简单重复图案，IDT孔径为10mm，间距为400μm。 SAW定子是通过提离工艺制造的。设备尺寸为29mm（宽）X29mm（长）。载玻片由三个直径为1mm的红宝石球和一个厚度为0.5mm且直径为8mm的塑料圆盘组成。利用四个射频驱动源，可以进行二维运动。当施加的驱动功率为28W且施加的驱动频率为9.6MHz时，放置在SAW传播表面上的滑块的最大速度为5mm / s。实验表明，基于声表面波的二维电动机将适用于小型电动机并提高分辨率。

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  • 来源
  • 会议地点 Xian(CN);Xian(CN)
  • 作者

    Zhang Guan; Li Yigui; Zhang Junfeng; Yang Chunshen; Liu Jingquan;

  • 作者单位

    Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Nano/Micro Fabrication Technology, Shanghai Jiao Tong University, Shanghai 200240, China;

    Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Nano/Micro Fabrication Technology, Shanghai Jiao Tong University, Shanghai 200240, China;

    Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Nano/Micro Fabrication Technology, Shanghai Jiao Tong University, Shanghai 200240, China;

    Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Nano/Micro Fabrication Technology, Shanghai Jiao Tong University, Shanghai 200240, China;

    Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Nano/Micro Fabrication Technology, Shanghai Jiao Tong University, Shanghai 200240, China;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 光学仪器;微电子学、集成电路（IC）;
  • 关键词

    surface acoustic wave; interdigital transducer; motor;

    机译：表面声波叉指换能器发动机;

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