Fabrication and performance of piezoelectric MEMS generators using bulk PZT films

著录项

• 来源
  《International Conference of Chinese Society of Micro-Nano Technology;Annual Conference of the Chinese Society of Micro-Nano Technology》|2010年|p.607-610|共4页
• 会议地点 Xian(CN);Xian(CN)
• 作者

  Gang Tang; Jing-quan Liu; He-sheng Liu; Yi-gui Li; Chun-sheng Yang; Dan-nong He;

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• 作者单位

  National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Shanghai Jiaotong University,Shanghai,200240,China,Dept. of Mechanical and Engineering, Nanchang Institute of Technology, Nanchang, 330099, China;

  National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Shanghai Jiaotong University,Shanghai,200240,China;

  National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Shanghai Jiaotong University,Shanghai,200240,China,College of Mechanical Electronic Engineering, Nanchang University, Nanchang, 330031,China;

  National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Shanghai Jiaotong University,Shanghai,200240,China;

  National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Shanghai Jiaotong University,Shanghai,200240,China;

  National Engineering Research Center for Nanotechnology, Shanghai, 200241, China;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 光学仪器;微电子学、集成电路（IC）;
• 关键词

  piezoelectric power generator; MEMS; bulk PZT film; energy harvesting;

  机译：压电发电机MEMS;大块PZT膜;能量收集;