• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Microelectronics Technology and Devices-SBMicro 2008 >Simulation and Fabrication of Suspended-Membrane Resistive Microbolometers Using Gold-Black as Absorber
【24h】

Simulation and Fabrication of Suspended-Membrane Resistive Microbolometers Using Gold-Black as Absorber

机译：以金黑为吸收剂的悬浮膜电阻微辐射热计的仿真与制作

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

This work presents thermal, mechanical and electrical simulations of a microbolometer and the fabrication of the device. It is used ANSYS for the FEM mechanical simulation and ATLAS for the thermal and electrical simulation. The fabrication methods and steps are described and preliminary results show good prediction by the simulations.
机译：这项工作介绍了微辐射热计的热，机械和电气仿真以及该设备的制造。 ANSYS用于FEM机械仿真，ATLAS用于热和电气仿真。描述了制造方法和步骤，并通过仿真初步结果显示出良好的预测。

著录项

  • 来源
  • 会议地点 Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR)
  • 作者

    F.L. Delia Lucia; J. W. Swart; L.B.Zoccal; J.A. Diniz; I. Doi; N.C. Frateschi;

  • 作者单位

    Center for Semiconductors Components, University of Campinas, Brazil Faculty of Electric and Computer Engineering, University of Campinas, Brazil Centro de Pesquisas Renato Archer, Campinas, Brazil;

    Center for Semiconductors Components, University of Campinas, Brazil Centro de Pesquisas Renato Archer, Campinas, Brazil;

    Center for Semiconductors Components, University of Campinas, Brazil;

    Center for Semiconductors Components, University of Campinas, Brazil Faculty of Electric and Computer Engineering, University of Campinas, Brazil;

    Center for Semiconductors Components, University of Campinas, Brazil Faculty of Electric and Computer Engineering, University of Campinas, Brazil;

    Center for Semiconductors Components, University of Campinas, Brazil;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 微电子学、集成电路（IC）;
  • 关键词

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号