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首页> 外文会议>Microelectronics Technology and Devices-SBMicro 2008 >Piezoelectric Stimulation of Microcantilever Beams for Young's Modulus Determination of Amorphous hydrogenated Silicon Carbide
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Piezoelectric Stimulation of Microcantilever Beams for Young's Modulus Determination of Amorphous hydrogenated Silicon Carbide

机译：微悬臂梁的压电刺激，用于测定杨氏模量的非晶氢化碳化硅

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摘要

In this work, the resonant frequency of cantilevers actuated using a piezoelectric ceramic disk is measured by optical means. Groups of amorphous hydrogenated silicon carbide (a-SiC:H) microcantilevers, that are fabricated by bulk micromachining of a silicon substrate, are used to extract the Young's modulus on different locations of the sample, which allows us to a map this mechanical property along the entire surface of the film. The determination of the Young's modulus of a-SiC:H is essential for the design and development of MEMS using this material. Specially because this material has low residual and gradient stresses, 70 MPa (compressive) and 36 MPa/μm, respectively, and its modulus of elasticity was determined to be 91 GPa, with small variation. The modulus of sputtered chromium was also measured (285 GPa).
机译：在这项工作中，通过光学装置测量使用压电陶瓷盘致动的悬臂的共振频率。通过对硅基板进行整体微加工而制造的非晶态氢化碳化硅（a-SiC：H）微悬臂组，用于提取样品不同位置上的杨氏模量，这使我们能够沿着该机械特性映射薄膜的整个表面。确定a-SiC：H的杨氏模量对于使用这种材料的MEMS设计和开发至关重要。特别是因为这种材料的残余应力和梯度应力低，分别为70 MPa（压应力）和36 MPa /μm，并且其弹性模量确定为91 GPa，变化很小。还测量了溅射铬的模量（285 GPa）。

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  • 会议地点 Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR)
  • 作者

    G. Rehder; M.N.P. Carreno;

  • 作者单位

    Departamento de Sistemas Eletronicos, Escola Politecnica, Universidade de Sao Paulo C.P. 61548, CEP 05424-970, Sao Paulo, SP, Brasil;

    Departamento de Sistemas Eletronicos, Escola Politecnica, Universidade de Sao Paulo C.P. 61548, CEP 05424-970, Sao Paulo, SP, Brasil;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 微电子学、集成电路（IC）;
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