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Fabrication and Characterization of an Impedance Micro-Bridge for Lab-on-a-Chip

机译:芯片实验室阻抗微桥的制作与表征

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摘要

Microelectronic sensors that apply physical effects to determine chemical measurements have generated significant interest in the past decade. In comparison to direct chemical sensors, where chemical-sensitive films are applied, physical chemosensors have a simpler design and easier fabrication, a higher selectivity, and better aging properties (1).
机译:在过去的十年中,应用物理效应来确定化学测量值的微电子传感器引起了人们的极大兴趣。与应用化学敏感膜的直接化学传感器相比,物理化学传感器的设计更简单,制造更容易,选择性更高,老化性能更好(1)。

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  • 来源
  • 会议地点 Sao Paulo(BR);Sao Paulo(BR)
  • 作者单位

    School of Electrical and Computer Engineering, University of Campinas, UNICAMP,Campinas, SP, Brazil;

    Laboratory of Microfabrication, Brazilian Synchrotron Light Laboratory, LNLS,Campinas, SP, Brazil;

    Laboratory of Microfabrication, Brazilian Synchrotron Light Laboratory, LNLS,Campinas, SP, Brazil;

    School of Electrical and Computer Engineering, University of Campinas, UNICAMP,Campinas, SP, Brazil;

    Institute of Chemistry, University of Campinas, UNICAMP, Campinas, SP, Brazil;

    School of Electrical and Computer Engineering, University of Campinas, UNICAMP,Campinas, SP, Brazil;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 半导体技术;
  • 关键词

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