Si-micromachined thermal flow sensors: devices, simulations and applications

机译：硅微加工热流传感器：设备，仿真和应用

获取原文

获取原文并翻译 | 示例

页面导航

摘要
著录项
相似文献
相关主题

摘要

A thermal mass flow sensor in bulk micromaching membrane technology is presented. This anemometric sensor is suitable for measurements of gaseous and liquid media. Semiconductor fabrication technology and thus low costs per single device enable an application in large numbers due to upcoming demands for all kind of environmental control including water flow monitoring.

机译：提出了一种采用批量微机膜技术的热质量流量传感器。该风速传感器适用于测量气态和液态介质。由于对包括水流监测在内的各种环境控制的需求不断增加，半导体制造技术以及因此每台设备的低成本使得大量应用成为可能。

著录项

来源
《Microelectronics technology and devices - SBMicro 2011》|2011年|p.283-290|共8页
会议地点 Joao Pessoa(BR);Joao Pessoa(BR)
作者
P. Lange M. Poech;
展开▼
作者单位

Fraunhofer Institut fuer Siliziumtechnologie, ISIT, Fraunhoferstrasse 1, D-25524 Itzehoe, Germany;

展开▼
会议组织
原文格式 PDF
正文语种 eng
中图分类半导体技术;
关键词

相似文献

外文文献
中文文献
专利

1. Pressure sensor positioning in an electrokinetic microrheometer device: simulations of shear-thinning liquid flows [J] . T. J. Craven, J. M. Rees, W. B. Zimmerman Microfluidics and nanofluidics . 2010,第2a3期

机译：电动微流变仪设备中的压力传感器定位：剪切稀化液体流动的模拟
2. Molecular dynamics simulations of the thermal conductivity of graphene for application in wearable devices [J] . Zhan Niwei, Chen Bo, Li Changzheng, Nanotechnology . 2019,第2期

机译：石墨烯导热率的分子动力学模拟可穿戴装置应用
3. Nonisothermal device simulation using the 2D numerical process/device simulator TRENDY and application to SOI-devices [J] . Wolbert P.B.M., Wachutka G.K.M. IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems . 1994,第3期

机译：使用2D数值过程/设备仿真器TRENDY进行非等温设备仿真并将其应用于SOI设备
4. Si-micromachined thermal flow sensors: devices, simulations and applications [C] . P. Lange, M. Poech Symposium on Microelectronics Technology and Devices . 2011

机译：Si-MicroChined热流传感器：设备，模拟和应用
5. Thermal Energy Harvesting with Thermoelectrics for Self-powered Sensors: With Applications to Implantable Medical Devices, Body Sensor Networks and Aging in Place [D] . Chen, Alic 2011

机译：用于自供电传感器的热电的热能收集：在植入式医疗设备，人体传感器网络和老化方面的应用
6. Stretching DNA by electric field and flow field in microfluidic devices: An experimental validation to the devices designed with computer simulations [O] . Cheng-Han Lee, Chih-Chen Hsieh 2013

机译：通过微流控设备中的电场和流场拉伸DNA：通过计算机模拟设计的设备的实验验证
7. Nonisothermal device simulation using the 2-D numerical process/device simulator TRENDY and application to SOI-devices [O] . Wolbert, Philip B.M., Wolbert, P.B.M., Wachutka, Gerhard K.M., 1994

机译：使用2-D数值过程/设备模拟器TRENDY进行非等温设备仿真，并将其应用于SOI设备

Si-micromachined thermal flow sensors: devices, simulations and applications

摘要

著录项

相似文献

相关主题

期刊订阅