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首页> 外文会议>Microelectronics technology and devices - SBMicro 2011 >Ti_3O_5 Nano- and Microfibers Prepared via Annealing of C-doped TiO_2 Thin Films Aiming at Solar Cell and Photocatalysis Applications
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Ti_3O_5 Nano- and Microfibers Prepared via Annealing of C-doped TiO_2 Thin Films Aiming at Solar Cell and Photocatalysis Applications

机译：通过C掺杂TiO_2薄膜退火制备的Ti_3O_5纳米纤维和微纤维，用于太阳能电池和光催化应用

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摘要

Ti_3O_5 nano- and microfibers were obtained via annealing of C-doped TiO_2 thin films aiming at solar cell electrodes and photocatalysis applications. 1.5wt% and 3.0 wt% carbon-doped TiO_2 films were deposited by e-beam evaporation and were annealed for 120min at 700℃, 900℃ and 1000℃ in wet nitrogen (0.8%H_2O). The films were analyzed by different techniques such as Fourier Transform InfraRed (FTIR), Energy-Dispersive X-ray Spectroscopy (EDS) conducted in a Scanning Electron Microscopy (SEM), Rutherford Backscattering Spectrometry (RBS), and Atomic Force Microscopy (AFM). It was noteworthy that the nano- and microfibers were formed for TiO_2 films annealed at 1000℃ temperature. In this case, the amorphous TiO_2 phase gave rise to crystalline phases of λ-Ti_3O_5 (75%) and rutile + trace of TiO_(2-x)C_x (25%) with a mesh of Ti_3O_5 fibers over a C-doped TiO_2 layer.
机译：Ti_3O_5纳米纤维和微纤维是通过对C掺杂的TiO_2薄膜进行退火而获得的，其目的是用于太阳能电池电极和光催化应用。通过电子束蒸发沉积1.5wt％和3.0 wt％的碳掺杂TiO_2膜，并在湿氮（0.8％H_2O）中分别于700℃，900℃和1000℃退火120分钟。通过诸如傅立叶变换红外（FTIR），在扫描电子显微镜（SEM），卢瑟福背散射光谱（RBS）和原子力显微镜（AFM）中进行的能量色散X射线光谱（EDS）等不同技术对薄膜进行了分析。 。值得注意的是，纳米纤维和微纤维是在1000℃退火的TiO_2薄膜上形成的。在这种情况下，无定形的TiO_2相产生了λ-Ti_3O_5（75％）的晶相，并在C掺杂的TiO_2层上形成了Ti_3O_5纤维网状的金红石+痕量的TiO_（2-x）C_x（25％）。 。

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