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首页> 外文会议>Microelectronics technology and devices - SBMicro 2011 >Fabrication of porous anodic alumina by single-step anodization: Influence of the molar concentration and effect of the chemical etching
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Fabrication of porous anodic alumina by single-step anodization: Influence of the molar concentration and effect of the chemical etching

机译：单步阳极氧化制备多孔阳极氧化铝：摩尔浓度的影响和化学刻蚀的影响

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摘要

Porous anodic alumina (PAA) films have been fabricated by single-step anodization for different concentrations of oxalic acid. The influence of the molar concentration on their average pore diameter was investigated and chemical etching processes for different times on the as-etched layer was performed in order to study its effect on the formation of self-organized nanopores. The experimental results show that controlling both, molar concentration and chemical etching times after anodization pores with different diameters can be easily prepared. This procedure leads to form porous alumina layers with high-quality two-dimensional hexagonal lattices and provide an ideal template for preparation of many one-dimensional nanomaterials.
机译：对于不同浓度的草酸，已经通过单步阳极氧化制备了多孔阳极氧化铝（PAA）膜。研究了摩尔浓度对其平均孔径的影响，并在蚀刻后的层上进行了不同时间的化学蚀刻工艺，以研究其对自组织纳米孔形成的影响。实验结果表明，在不同直径的阳极氧化孔后，可以很容易地控制摩尔浓度和化学蚀刻时间。该过程导致形成具有高质量二维六边形晶格的多孔氧化铝层，并为制备许多一维纳米材料提供了理想的模板。

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  • 来源
  • 会议地点 Joao Pessoa(BR);Joao Pessoa(BR)
  • 作者

    R. H. Bustamante; D. S. Raimundo; H. A. A. Champi; H. Y. Kim; W. J. Salcedo;

  • 作者单位

    Laboratorio de Microeletronica, Universidade de Sao Paulo, Sao Paulo, 05508900, Brazil;

    Faculdade de Tecnologia de Sao Bernardo do Campo, SBC, Sao Paulo, 09751000, Brazil;

    Laboratorio de Microeletronica, Universidade de Sao Paulo, Sao Paulo, 05508900, Brazil;

    Laboratorio de Microeletronica, Universidade de Sao Paulo, Sao Paulo, 05508900, Brazil;

    Laboratorio de Microeletronica, Universidade de Sao Paulo, Sao Paulo, 05508900, Brazil;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 半导体技术;
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