Fabrication of a microfluidic system with integrated electrochemical pump and valves

机译：具有集成电化学泵和阀的微流体系统的制造

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An integrated microfluidic system with a check valve and a micropump based on electrochemical actuation was designed and fabricated using UV-LIGA microfabrication technologies. The main components of the system include two electrochemical (ECM) actuators, a polydimethylsiloxane (PDMS) membrane, and multi levels of covers. The thickness of the membrane is 100 μm thick and the thickness of the PDMS structure is 1000 μm. Hydrogen gas bubbles were generated from Pt black electrodes with 1M of NaCl solution in the valve chamber. Experimental results proved that the system can be operated by controlling the electrical signals supplied to the ECM actuators.

机译：使用UV-LIGA微细加工技术设计和制造了具有单向阀和基于电化学驱动的微泵的集成微流体系统。该系统的主要组件包括两个电化学（ECM）促动器，一个聚二甲基硅氧烷（PDMS）膜和多层盖板。膜的厚度为100μm，PDMS结构的厚度为1000μm。在阀室内，用1M NaCl溶液从Pt黑色电极上产生氢气气泡。实验结果证明，该系统可以通过控制提供给ECM执行器的电信号进行操作。

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来源
《Microfluidics, BioMEMS, and Medical Microsystems V; Proceedings of SPIE-The International Society for Optical Engineering; vol.6465》|2007年|64650B.1-64650B.8|共8页
会议地点 San JoseCA(US)
作者
Dong Eun Lee; Steve Soper; Wanjun Wang;
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作者单位

Department of Mechanical Engineering Louisiana State University, Baton Rouge, LA 70803, USA;

Department of Chemistry Louisiana State University, Baton Rouge, LA 70803, USA;

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会议组织
原文格式 PDF
正文语种 eng
中图分类微电子学、集成电路（IC）;生物工程学（生物技术）;
关键词
eelctrochemical microacuator; SU-8; PDMS; UV-LIGA; electolysis;

机译：电化学微致动器SU-8; PDMS； UV-LIGA；电解;

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1. The Way to High Volume Fabrication of Lab-on-a-Chip Devices-A Technological Approach for Polymer Based Microfluidic Systems with Integrated Active Valves and Pumps [J] . Jochen Rupp, Manuela Schmidt, Bettina Giinther, Journal of Microelectronics and Electronic Packaging . 2009,第4期

机译：大规模制造芯片实验室设备的方法-一种集成主动阀和泵的基于聚合物的微流体系统的技术方法
2. Integrated microfluidic system with electrochemically actuated on-chip pumps and valves [J] . Hiroaki Suzuki, Rei Yoneyama Sensors and Actuators. B, Chemical . 2003,第1a2期

机译：集成微流体系统，带有电化学驱动的片上泵和阀
3. Polymer lab-on-chip systems with integrated electrochemical pumps suitable for large-scale fabrication [J] . J. Nestler, A. Morschhauser, K. Hiller, The International Journal of Advanced Manufacturing Technology . 2010,第1a4期

机译：带有集成电化学泵的聚合物片上系统适用于大规模制造
4. Fully integrated polymer based microfluidic pumps and valves in Lab-on-Chip systems for Point-of-Care use [C] . Joerg Nestler, Andreas Morschhauser, Karla Hiller, European Conference Exhibition on integration issues of miniaturized systems – MEMS, MOEMS, ICs and Electronic Components . 2007

机译：基于完全集成的聚合物基微流体泵和阀门在芯片上的系统中进行护理点使用
5. Design and fabrication of microfluidic integrated circuits using normally-closed elastomeric valves. [D] . Mosadegh, Bobak. 2010

机译：使用常闭弹性阀设计和制造微流体集成电路。
6. Lab-on-chip FIA system without an external pump and valves and integrated with an in line electrochemical detector [O] . I-Jane Chen, Ernö Lindner -1

机译：实验室级芯片FIa系统无需外部泵和阀和在线电化学检测器具有集成
7. Electrochemical fabrication of conducting polymer nanowires in an integrated microfluidic system [O] . Wang Jun, Bunimovich Yuri L., Sui Guodong, 2006

机译：集成微流体系统中导电聚合物纳米线的电化学制备

Fabrication of a microfluidic system with integrated electrochemical pump and valves

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