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Qualification of optical measurement techniques for the investigation of material parameters of microcomponents

机译：光学测量技术的资格，用于研究微组件的材料参数

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Abstract: The growing development of modern microcomponents, structures and systems, makes it necessary to qualify large-scale approved measurement methods for the investigation in micro- scales. New materials and structural design are employed whose behavior cannot be easily predicted by FE-methods. Material properties and boundary conditions which are known form large- scale investigations may differ considerably for components with micro-scale dimensions. Other problems are due to the high aspect ratio of the micro structures which makes it necessary to consider the real shape of the component especially for reliability studies. Consequently a wide field has been opened for optical and dimensional metrology with respect to the investigation of microcomponents. Many methods which were tested successfully at big components can be used for microcomponents, too. But new ways must be followed especially in the field of loading, handling and observing micro-scale components. The article deals with optical techniques which have proven to be useful for the investigation of large-scale components and their qualification for the investigation of microcomponents. For the discussion the 3 problem classes mentioned above are taken into account. !26
机译：摘要：现代微组件，结构和系统的不断发展，使得有必要对大规模批准的测量方法进行微观尺度的研究进行鉴定。采用了新材料和结构设计，其行为无法通过有限元方法轻松预测。大规模研究中已知的材料特性和边界条件对于具有微米尺度尺寸的组件可能会有很大不同。其他问题是由于微结构的高长宽比所致，因此有必要考虑部件的实际形状，尤其是在可靠性研究中。因此，关于微部件的研究已经为光学和尺寸计量学打开了广阔的领域。在大型组件上成功测试的许多方法也可以用于微型组件。但是必须遵循新的方法，尤其是在装载，处理和观察微型零件的领域。本文介绍了光学技术，这些光学技术已被证明对大规模零件的研究及其对微零件的研究具有一定的资格。为了进行讨论，考虑了上述3个问题类别。 ！26

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