Inspection of microsystems with a laser scanning microscope

机译：用激光扫描显微镜检查微系统

获取原文

获取原文并翻译 | 示例

页面导航

摘要
著录项
相似文献
相关主题

摘要

Abstract: Hybrid microsystems with optical and mechanical functions can be implemented economically only by an automated assembly. In order to guarantee a high quality of the products, the use of a flexible and simply manageable process control system is necessary. The Laser-Scanning-Microscopy, based on the confocal microscopy, is suitable due to the variable magnification and the threedimensionally visualization ideally for the automated micro-assembly. The confocal Laser-Scanning- Microscope (CLSM) serves in fabrication and also in assembly apart from the process visualization for the analyze for micro surface structures, the detection of defects or the measurement of threedimensional geometries of microparts. !6

机译：摘要：具有光学和机械功能的混合微系统只能通过自动组装经济地实现。为了保证产品的高质量，必须使用灵活且易于管理的过程控制系统。基于共聚焦显微镜的激光扫描显微镜是合适的，因为它具有可变的放大倍率和三维可视化效果，非常适合自动化显微组装。共聚焦激光扫描显微镜（CLSM）不仅用于过程可视化，而且还用于制造和装配，用于分析微观表面结构，检测缺陷或测量微观零件的三维几何形状。！6

著录项

来源
《Microsystems Metrology and Inspection》|1999年|p.144-150|共7页
会议地点 Munich(DE)
作者
Gerd Dussler; Aachen Univ. of Technology; Aachen; Germany; B.Broecher; Aachen Univ. of Technology; Aachen; Germany; Tilo Pfeifer; Aachen Univ. of Technology; Aachen; Germany.;
展开▼
作者单位

展开▼
会议组织
原文格式 PDF
正文语种 eng
中图分类 TH1;
关键词

相似文献

外文文献
中文文献
专利

1. Non-Contact Surface Morphology Analysis of CO_2 Laser-Irradiated Teeth by Scanning Electron Microscope and Confocal Laser Scanning Microscope [J] . Magda Kiyoko Yamada, Motohiro Uo, Shoji Ohkawa Materials transactions . 2004,第4期

机译：扫描电子显微镜和共聚焦激光扫描显微镜对CO_2激光辐照牙齿的非接触表面形态分析
2. The effect of five mechanical instrumentation protocols on implant surface topography and roughness: A scanning electron microscope and confocal laser scanning microscope analysis [J] . Cha Jae-Kook, Paeng Kyeongwon, Jung Ui-Won, Clinical oral implants research . 2019,第6期

机译：五种机械仪表对植入物地形和粗糙度的影响：扫描电子显微镜和共聚焦激光扫描显微镜分析
3. Evaluation of Enterococcus faecalis adhesion, penetration, and method to prevent the penetration of Enterococcus faecalis into root cementum: Confocal laser scanning microscope and scanning electron microscope analysis [J] . Rahul S. Halkai, Mithra N. Hegde, Kiran R. Halkai Journal of Conservative Dentistry . 2016,第6期

机译：粪肠球菌的粘附，渗透和防止粪肠球菌渗入牙骨质的方法的评估：共聚焦激光扫描显微镜和扫描电子显微镜分析
4. Inspection of Microsystems with a Laser-Scanning-Microscope [C] . G. Dussler, B. Br#cher, T. Pfeifer Conference on microsystems metrology and inspection . 1999

机译：用激光扫描显微镜检查微系统
5. The construction of a titanium:sapphire self-starting laser and two-photon laser-scanning microscope with applications in optical memory. [D] . Previte, Michael John Robert. 2001

机译：钛：蓝宝石自启动激光器和双光子激光扫描显微镜的构造，并应用于光学存储器。
6. Scanning electron microscope comparative surface evaluation of glazed-lithium disilicate ceramics under different irradiation settings of Nd:YAG and Er:YAG lasers [O] . Josko Viskic, Drazen Jokic, Suzana Jakovljevic, 2018

机译：扫描电子显微镜比较表面评价Nd：YAG和ER：YAG激光器下的不同照射设置玻璃静态陶瓷
7. Figure 7: Images of Huh-7 cells incubated with DiI lablled LSPMbs and controls obtained by light microscope and confocal laser scanning microscope. [O] . -1

机译：图7：用光学显微镜和共聚焦激光扫描显微镜获得的DII Labled Lspmbs和控制的Huh-7细胞的图像。

Inspection of microsystems with a laser scanning microscope

摘要

著录项

相似文献

相关主题

期刊订阅