Abstract: A micromachined chopper has demonstrated modulation of coherent and incoherent light. The chopper uses an electro-statically driven lateral micromotor to actuate a shutter plate across a through-substrate window. Test devices have been fabricated and exhibit operating frequencies ranging from 1 to 31 kHz and have stable defection amplitudes of 400 $mu@m. Further optimizations of the design are discussed. !9
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