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Micromolding of Pb and Zn with Surface Engineered LiGA Mold Inserts

机译：表面工程LiGA模具插件对Pb和Zn进行微成型

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摘要

Molding of Pb and Zn metal plates with LiGA (Lithographie, Galvanoformung, Abformung) fabricated Ni micro-scale mold inserts was carried out with as fabricated Ni inserts and Ni inserts conformally coated with Ti-containing hydrocarbon (Ti-C:H) coatings. The molding performance was characterized using scanning electron microscopy (SEM) and energy-dispersive spectroscopy (EDS), in terms of the generated features on the metal plates as well as the inserts condition after molding. The present results demonstrate that, in cases where significant metal/insert chemical interactions exist, surface modification of the mold insert is necessary to obtain satisfactory performance. Furthermore, conformal deposition of suitable engineered ceramic coatings onto Ni micro-scale mold inserts is effective for high temperature micromolding of reactive metals.
机译：用LiGA（Lithographie，Galvanoformung，Abformung）制造的Ni微型模具镶块对Ni和Pb和Zn金属板进行模制，该Ni微型模具镶块使用制成的Ni镶块和Ni镶块共形涂覆了含Ti的烃（Ti-C：H）涂层。根据金属板上产生的特征以及成型后的插入条件，使用扫描电子显微镜（SEM）和能量分散光谱（EDS）表征成型性能。本结果表明，在存在明显的金属/嵌件化学相互作用的情况下，必须对模具嵌件进行表面改性以获得令人满意的性能。此外，合适的工程陶瓷涂层在Ni微型模具嵌件上的保形沉积对于活性金属的高温微成型是有效的。

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