Molding of Pb and Zn metal plates with LiGA (Lithographie,Galvanoformung,Abformung) fabricated Ni micro-scale mold inserts was carried out with as fabricated Ni inserts and Ni inserts conformally coated with Ti-containing hydrocarbon (Ti-C:H) coatings.The molding performance was characterized using scanning electron microscopy (SEM) and energy-dispersive spectroscopy (EDS),in terms of the generated features on the metal plates as well as the inserts condition after molding.The present results demonstrate that,in cases where significant metal/insert chemical interactions exist,surface modification of the mold insert is necessary to obtain satisfactory performance.Furthermore,conformal deposition of suitable engineered ceramic coatings onto Ni micro-scale mold inserts is effective for high temperature micromolding of reactive metals.
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