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Effect of Different AFM micro cantilever in fluid on the rough surface topography quality close to the surface

机译：流体中不同原子力显微镜微悬臂梁对靠近表面的粗糙表面形貌质量的影响

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摘要

The use of higher vibration modes and different geometries of the AFM piezoelectric micro cantilever (MC) is affected by the surface topography quality in a liquid medium. Therefore, utilizing an appropriate geometry and vibration mode is of a great importance. This paper analyzes AFM MC types with rectangular, dagger and V-shaped geometries in the noncontact and tapping modes in a liquid medium for rough surfaces in Nanoscale. The modified couple stress theory (MCS) in a liquid medium according to Timoshenko beam theory is used in order to enhance the accuracy of equations. In addition, the differential quadrature (DQ) method has been used to solve the equations. Identification of environmental forces helps an exact investigation of the system vibration amplitude. Investigating the effect of geometric and force parameters on the MC vibration behavior leads to understanding the system and to design it properly in a liquid medium. Also, due to oscillating the MC near the sample surface, the effect of interaction forces between the sample surface and the MC, including van der Waals, contact and squeeze forces is analyzed in a liquid medium in addition to the hydrodynamic forces. Furthermore, due to the sever reduction of the MC amplitude caused by the squeeze force; the MC is angled in comparison with the horizontal surface.
机译：AFM压电微悬臂梁（MC）的较高振动模式和不同几何形状的使用受液体介质中表面形貌质量的影响。因此，利用适当的几何形状和振动模式非常重要。本文分析了在纳米级粗糙表面的液体介质中，非接触和攻丝模式下具有矩形，匕首和V形几何形状的AFM MC类型。为了提高方程的准确性，使用了根据Timoshenko束理论的液体介质中的改进耦合应力理论（MCS）。此外，微分正交（DQ）方法已用于求解方程。识别环境力有助于准确调查系统的振动幅度。研究几何参数和力参数对MC振动行为的影响有助于理解系统并在液体介质中进行适当设计。另外，由于MC在样品表面附近振荡，除了流体动力外，还分析了液体介质中样品表面与MC之间的相互作用力（包括范德华力，接触力和挤压力）的影响。此外，由于挤压力导致MC幅值严重降低；与水平表面相比，MC倾斜。

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