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Nanoimprinted polymer chips for light induced local heating of liquids in micro- and nanochannels

机译:纳米压印聚合物芯片,用于光诱导微通道和纳米通道中液体的局部加热

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A nanoimprinted polymer chip with a thin near-infrared absorber layer that enables light-induced local heating (LILH) of liquids inside micro- and nanochannels is presented. An infrared laser spot and corresponding hot-spot could be scanned across the device. Large temperature gradients yield thermophoretic forces, which are used to manipulate and stretch individual DNA molecules confined in nanochannels. The absorber layer consists of a commercially available phthalocyanine dye (Fujifilm), with a narrow absorption peak at approximately 775 nm, dissolved in SU-8 photoresist (Microchem Corp.). The 500 nm thick absorber layer is spin-coated on a transparent substrate and UV exposed. Micro-and nanofluidic channels are defined by nanoimprint lithography in a 1.5 μm thick layer of low molecular weight polymethyl methacrylate (PMMA, Microchem Corp.), which is spin coated on top of the absorber layer. We have used a previously developed two-level hybrid stamp for replicating two V-shaped microchannels (width=50 μm and height = 900 nm) bridged by an array of 200 nanochannels (width and height of 250 nm). The fluidic channels are finally sealed with a lid using PMMA to PMMA thermal bonding. Light from a 785 nm laser diode was focused from the backside of the chip to a spot diameter down to 5 μm in the absorber layer, yielding a localized heating (Gaussian profile) and large temperature gradients in the liquid in the nanochannels. A laser power of 38 mW yielded a temperature of 40℃in the center of a 10 μm 1/e diameter. Flourescence microscopy was performed from the frontside.
机译:提出了一种具有薄的近红外吸收层的纳米压印聚合物芯片,该芯片能够对微通道和纳米通道内的液体进行光诱导的局部加热(LILH)。可以扫描整个设备上的红外激光点和相应的热点。大的温度梯度会产生热泳力,该热泳力用于操纵和拉伸限制在纳米通道中的单个DNA分子。吸收层由溶于SU-8光刻胶(Microchem Corp.)的市售酞菁染料(Fujifilm)组成,其在约775nm处具有窄吸收峰。将500 nm厚的吸收层旋涂在透明基板上,并进行UV曝光。通过纳米压印光刻技术,在1.5微米厚的低分子量聚甲基丙烯酸甲酯(PMMA,Microchem Corp.)层中定义微流道和纳米流道,该层旋涂在吸收层的顶部。我们已使用先前开发的两级混合印记来复制由200个纳米通道(宽度和高度为250 nm)桥接的两个V形微通道(宽度= 50μm,高度= 900 nm)。最终,使用PMMA到PMMA的热粘合用盖将流体通道密封。来自785 nm激光二极管的光从芯片背面聚焦到吸收层中低至5μm的光斑直径,从而在纳米通道中的液体中产生局部加热(高斯分布)和较大的温度梯度。 38 mW的激光功率在10μm1 / e直径的中心产生40℃的温度。从正面进行荧光显微镜检查。

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