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首页> 外文会议>Nanomaterial Synthesis and Integration for Sensors, Electronics, Photonics, and Electro-Optics; Proceedings of SPIE-The International Society for Optical Engineering; vol.6370 >SENSING USING NANOSTRUCTURED METAL OXIDE THIN FILMS
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SENSING USING NANOSTRUCTURED METAL OXIDE THIN FILMS

机译：纳米结构化金属氧化物薄膜的传感

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摘要

Metal oxides gas sensing properties particularly for In_2O_3 and ZnO nanostructures and nanostructured thin films are reviewed. Fabrication methods for these most commonly used metal oxides are presented, followed by a study on how growth techniques lead to nanostructures and nanostructured polycrystalline films with surface features of nanometer scale for film thickness bellow 1μm. The study continues with a discussion on how, a broad range of morphological parameters, affect the thin film response to various gases. After an overview, the study focus on thin films prepared by reactive dc magnetron sputtering and pulsed laser deposition in different growth conditions. In_2O_3 and ZnO thin films prepared for ozone sensing exhibit resistivity changes of five to eight orders of magnitude at room temperature after exposure to UV light and subsequent ozone treatment. Structural properties, i.e., crystallinity and microstructure investigated by X-ray diffraction (XRD) and Atomic Force Microscopy (AFM) are studied. The nanostructure and nanostructured surfaces are highly controlled by the deposition parameters, which, control the transport properties, and thus the sensing characteristics as measured by conductometric techniques. Analyses on the sensing response of nanostructures and nanostructured In_2O_3 and ZnO films for different gases are presented. Experiments on Surface Acoustic Wave (SAW) devices based on In_2O_3 and ZnO thin films fabricated on LiNbO3 substrates indicate the capability of achieving sensing levels in the low ppb range.
机译：综述了金属氧化物气体感测特性，特别是对于In_2O_3和ZnO纳米结构以及纳米结构薄膜。介绍了这些最常用的金属氧化物的制备方法，然后研究了生长技术如何导致纳米结构和纳米结构的多晶膜，其膜厚为1μm的纳米级表面特征。该研究将继续讨论各种形态学参数如何影响薄膜对各种气体的响应。经过概述后，研究重点是在不同的生长条件下通过反应性直流磁控溅射和脉冲激光沉积制备的薄膜。在暴露于紫外线并随后进行臭氧处理之后，室温下制备的用于臭氧感测的In_2O_3和ZnO薄膜的电阻率变化为5至8个数量级。研究了通过X射线衍射（XRD）和原子力显微镜（AFM）研究的结构性质，即结晶度和微观结构。纳米结构和纳米结构表面受到沉积参数的高度控制，沉积参数控制传输性能，从而控制电导技术所测得的传感特性。提出了纳米结构以及纳米结构的In_2O_3和ZnO薄膜对不同气体的传感响应的分析。基于在LiNbO3衬底上制造的基于In_2O_3和ZnO薄膜的表面声波（SAW）器件的实验表明，能够在低ppb范围内实现感应水平。

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