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Radiation Effects on Multiple DOF MEMS Inertial Sensors

机译：辐射对多个自由度MEMS惯性传感器的影响

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摘要

Much work has been conducted and published in the area of radiation hardening of electronics. These efforts have yielded an array of techniques and design protocols for mitigating radiation effects in hardware. However, in the field of MEMS sensor systems, radiation can impact not only the support structure but the MEMS structure itself. In this work, a new multiple degree-of-freedom MEMS inertial sensor called MARS (MEMS Annular Rotating Sensor) has been subjected to Co~(60) gamma-ray irradiation and results analyzed for total dose effects. Pre- and post-radiation tests reveal that the sensor's accelerometer noise performance is enhanced by the exposure. Quantitatively, noise levels improved after radiation by roughly 40% in the X and Y axes and 75% in the Z axes. Additionally, any effects of radiation on sensor offset were not discernable.
机译：在电子器件的辐射硬化领域已经进行了许多工作并发表。这些努力产生了一系列技术和设计协议，用于减轻硬件中的辐射影响。然而，在MEMS传感器系统领域，辐射不仅会影响支撑结构，而且会影响MEMS结构本身。在这项工作中，一种名为MARS（MEMS环形旋转传感器）的新型多自由度MEMS惯性传感器已经受到Co〜（60）γ射线辐照，并对结果进行了总剂量效应分析。辐射前和辐射后的测试表明，曝光可以增强传感器的加速度计噪声性能。从数量上讲，辐射后的噪声水平在X和Y轴上分别提高了约40％，在Z轴上提高了75％。此外，辐射对传感器偏移的任何影响都无法分辨。

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  • 来源
  • 会议地点 San Diego CA(US)
  • 作者

    Bill Dillard; Victor Trent; Michael Greene;

  • 作者单位

    Archangel Systems, Inc., 1635 Pumphrey Ave., Auburn, AL 36832 Edward W. Taylor, International Photonics Consultants, Inc.38 Knife Edge Place, Pagosa Springs, CO 81147;

    Archangel Systems, Inc., 1635 Pumphrey Ave., Auburn, AL 36832 Edward W. Taylor, International Photonics Consultants, Inc.38 Knife Edge Place, Pagosa Springs, CO 81147;

    Archangel Systems, Inc., 1635 Pumphrey Ave., Auburn, AL 36832 Edward W. Taylor, International Photonics Consultants, Inc.38 Knife Edge Place, Pagosa Springs, CO 81147;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 应用光学;
  • 关键词

    MEMS; inertial sensor; radiation; gyroscope; accelerometer;

    机译：MEMS;惯性传感器辐射;陀螺仪加速度计;

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