首页> 外文会议>Nanostructured materials, thin films and hard coatings for advanced applications >Characterization and ethanol sensing properties of Pt-doped Sn-O-Te thin films
【24h】

Characterization and ethanol sensing properties of Pt-doped Sn-O-Te thin films

机译:掺Pt的Sn-O-Te薄膜的表征和乙醇感测性能

获取原文
获取原文并翻译 | 示例

摘要

Thin films (40-60 nm) prepared by co-evaporation of Sn and TeO2 were studied as ethanol gas sensors. In the as-deposited state, the films thus obtained are amorphous and consist of mixed Te and Sn oxides, doped with Te, Sn, and/or SnTe (depending on the atomic ratio between Sn and Te (RSn/Te)), due to interaction between the two substances during the co-deposition. After stepwise thermal treatment of films with RSn/Te ≈ 2.3 up to 360oC (by 40oC steps, for 15 minutes at each temperature) nanocrystalline films, built up of a mixture of SnO2, TeO2 and unstoichiometric Sn oxide were obtained. The Pt-doping was realized by thermal evaporation in a separate vacuum cycle, after the annealing. To study the film composition and structure as well as the volume distribution of the elements different electron microscopy techniques (TEM, SAED) and analytical methods (EDS in SEM, AES) were applied.The sensitivity towards ethanol vapours was investigated as a function of the substrate temperature (T) in the range from 20oC to 200oC. High sensitivity has been observed for Pt-doped films at T = 120oC. No cross sensitivity to relative humidity (RH [%]) was observed at this temperature. Further improvement of the sensitivity could be obtained by optimization of the thermal processing, Pt-doping and working temperature.
机译:研究了通过共蒸发Sn和TeO2制备的薄膜(40-60 nm)作为乙醇气体传感器。在沉积状态下,如此获得的膜是非晶态的,由掺有Te,Sn和/或SnTe(取决于Sn和Te之间的原子比(RSn / Te))的Te和Sn混合氧化物组成。在共沉积过程中两种物质之间的相互作用。在对RSn / Te≈2.3的薄膜进行逐步热处理后,最高可达到360oC(通过40oC的步骤,在每个温度下放置15分钟),得到的纳米晶膜由SnO2,TeO2和不计量的Sn氧化物的混合物组成。退火后,通过在单独的真空循环中进行热蒸发来实现Pt掺杂。为了研究膜的组成和结构以及元素的体积分布,应用了不同的电子显微镜技术(TEM,SAED)和分析方法(SEM,AES中的EDS),研究了乙醇蒸气对乙醇蒸气的敏感性。基板温度(T)为20oC至200oC。在T = 120oC时,已观察到掺Pt薄膜的高灵敏度。在此温度下未观察到对相对湿度的交叉敏感性(RH [%])。通过优化热处理,Pt掺杂和工作温度,可以进一步提高灵敏度。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号